Search this site
Embedded Files
Skip to main content
Skip to navigation
SDL
實驗室簡介
Device gallery
experiment control program
DC SQUID Electronics XXF-1
Facilities
1.5 THz Transmitter (兆赫波光源組)
3D Laser confocal microscope and profile analysis software (3D雷射共軛焦顯微鏡及輪廓分析軟體)
Alpha Step Profiler (薄膜測厚儀)
Alpha Step Profiler (表面應力及型狀測試儀)
Automatic Dicing Saw (晶片切割儀器)
Cartridge Test Cryostat (低溫恆溫器)
Composite Germanium Bolometer Detector System (複合鍺輻射熱測定器偵測系統)
DUV Mask Aligner for Both Sides Alignment (雙面對準深紫外曝光機)
Electron Beam Evaporator (電子束蒸鍍機)
High speed x-ray detector (X光低溫繞射儀之高速偵測器)
Inductively Coupled Plasma Reactive Ion Etcher (電感耦合電漿離子反應式蝕刻機)
Ion Beam Deposition System (氧化物濺鍍系統)
Ion Etcher System (離子蝕刻系統)
Lapping and Polishing Machine for THz Beam Splitters (兆赫波分光器鏡面磨製機)
Mask Aligner (光罩對準機主體及其他配件)
Metal Films Deposition System (薄膜濺鍍機)
Multi-chamber Sputtering System (多腔體濺鍍系統)
Reactive Ion Etching System (反應式離子蝕刻系統)
Sub-Millimeter-wave Fourier Transformation Spectrometer (次毫米波傅立葉轉換光譜儀)
UHV Magnetron Sputtering Deposition System (超高真空磁控濺鍍系統)
Thermal Field Emission Scanning Electron Microscope (高解析熱電子型場發射掃描式電子顯微鏡)
File
340GHz coupler simulation
340GHz power divider
4-pixel Cartridge
Au Reflector
Beam Splitter
TE Mode
Measurement
Raw Data
TM Mode
Measurement
Four-pixel Lo power distributor
Experiments
20190611
20190618
20190703
Clean room maintainance
E-Gun
Conferences
2015 EA Rx workshop
2016 JCMT Instrument Workshop
2020 21th EA Rx workshop
TPS2020 meeting
EBL
20180131 EBL Path Test
20180305-Line pattern Test
20180308-Line pattern Test
20180322 Line Pattern Test
20180331 Line Pattern Test
201809 Contact pad gap test
20190802 EBL Test
20200226 2A Line Test
20200406 2A Line Test
20201029 SMANTHU-Ni Block Test
20201110 4A4000rpm test on Quartz & Si
20201112 4A 4000 rpm Test on Si
20201112 SMAHTHU-1-7 Test Ni Block
20201214 EBLTest-PMMA on Al
ASPhy device
Calibration
20150618
20150709
20150824
20151015
20151027
20151103
20151110
20160222
20160303
20160310
20160314
20160321
20160324
20160406
20160411
PMMA
Facility
M3 - 6 inch system
1 廠驗報告_FSE 20210602
2 交機及到貨簽收單_20210610
3 安裝_ (before 20210716)
4 system operation test
5 thin film deposition test
Sample List of M3
M3-001-Nb-20210629
M3-002-Nb-20210701
M3-003-Nb-20210702
M3-004-Al-20210723
M3-005-Nb-20210727
M3-006-Al-2021072702
M3-007-Al-20210728
M3-008-Al-2021072802
FeSe Nanowire & Nanosheet
20190620
20200215
20210618 IoP-KY-FeSe
FeSeTe thin film
Graphene Devices
20190723 Graphene Devices
20190821 Graphene device
20200316 Graphene BowTie
20200323 Graphene BowTie (Si)
20200608 Graphene BowTie (SiO2/Si)
NbN Film: IBD
IBD 1~20
IBD-002-20160106
IBD-004-20160130
IBD-005-20160201
IBD-006-20160202-1
IBD-007-20160202-2
IBD-008-20160203
IBD-019-20160225
IBD-020-20160314
IBD-003-20160113
IBD 21~40
IBD-021-20160316
IBD-022-20160321
IBD-023-20160323
IBD-024-20160329
IBD-025-20160420
IBD-026-20160421
IBD-027-20160426
IBD-028-20160427
IBD-029-20160428
IBD-030-20160429
IBD-031-20160511
IBD-032-20160512
IBD-033-20160516
IBD-034-20160517
IBD-035-2016051801
IBD-036-2016051802
IBD-037-20160523
IBD-038-20160524
IBD-039-20160601
IBD-040-20160602
IBD 41~60
IBD-041-20160603
IBD-042-20160604
IBD-044-20160706
IBD-045-20160713
IBD-046-20160714
IBD-047-20160719
IBD-048-20160720
IBD-049-20160726
IBD-050-20160727
IBD-051-20160728
IBD-052-20160728
IBD-053-20160802
IBD-054-2016080301
IBD-055-2016080302
IBD-056-2016080401
IBD-057-2016080402
IBD-058-20160810
IBD-059-2016081002
IBD-060-20160811
IBD 61~80
IBD-061-20160922
IBD-062-20161012
IBD-063-20161013
IBD-064-20161020
IBD-065-20161024
IBD-066-20161102
IBD-067-20161103
IBD-068-20161109
IBD-072-2016111601
IBD-073-206111602
IBD-074-20161117
IBD-076-20161124
IBD-077-20161216
IBD-078-20161219
IBD-079-20161227
IBD-080-20170112
IBD 81~100
IBD-081-20170124
IBD-082-20170125
IBD-083-20170216
IBD-084-20170222
IBD-085-20170223
IBD-086-20170310
IBD-087-20170418
IBD-088-20170425_AlN
IBD-089-20170428
IBD-090-20170503
IBD-091-20170504_65Å AlN
IBD-092-20170511
IBD-093-20170516
IBD-094-2017051801
IBD-095-2017051802
IBD-096-20170519
IBD-097-20170605
IBD-098-20170606
IBD-099-20170607
IBD-100-20170608
IBD 101~120
IBD-101-2017061201
IBD-102-2017061202
IBD-103-20170614
IBD-104-20170620
IBD-105-20170621
IBD-106-2017062201
IBD-107-2017062202
IBD-108-20170628
IBD-109-20170629
IBD-110-20170629
IBD-111-2017063001
IBD-112-2017063002
IBD-113-2017071201
IBD-114-2017071202
IBD-115-20170713
IBD-116-20170718-AlN
IBD-117-20170718
IBD-118-20170719
IBD-119-20170720
IBD-120-20170721
IBD 121~140
IBD-121-20170722
IBD-122-20170722
IBD-123-20170902
IBD-124-20170903
IBD-125-20170904
IBD-126-20170914-AlN
IBD-127-20170923
IBD-128-20170925
IBD-129-20170925
IBD-130-20170926
IBD-131-20171017-AlN
IBD-132-20171020
IBD-133-20171025
IBD-134-20171026
IBD-135-20171102
IBD-136-20171213
IBD-137-20171227
IBD-138-20171228
IBD-139-20171228
IBD-140-20171229
IBD 141~160
IBD-143-20180412
IBD-144-20180427
IBD-145-20180508-AlN
IBD-146-20180522-AlN
IBD-148-2018052301
IBD-149-2018052302
IBD-150-2018061401
IBD-151-2018061402
IBD-152-20180730
IBD-153-20180809
IBD-154-20180815-AlN 3nm
IBD-155-20180816
IBD-156-20180823
IBD-157-20180913
IBD-158-20181025-AlN
IBD-159-20181127
IBD-160-20181130
IBD 161~180
IBD-161-20181203
IBD-162-20181203
IBD-163-20190102-AlN 20 nm
IBD-164-20190226
IBD-165(T)-20190327
IBD-166(T)-20190418
IBD-167(T)-20190430
IBD-168-20190502-Al
IBD-169(T)-20190502
IBD-170(T)-20190516
IBD-171(T)-20190521
IBD-172(T)-20190521
IBD-173(T)-20190524
IBD-174(T)-20190528
IBD-175(T)-20190529
IBD-176(T)-20190604
IBD-177(T)-20190605
IBD-178(T)-20190606
IBD-179(T)-20190610
IBD-180(T)-20190611
IBD 181~200
IBD-181(T)-20190612
IBD-182(T)-20190613
IBD-189(T)-20190715
IBD-190(T)-20190923
IBD-191-20190924_TaN
IBD-192(T)-20190924
IBD-193(T)-20190926
IBD-194-20190926_TaN
IBD-196(T)-20191225
IBD 201~220
IBD-203-20200106-AlN_100%
IBD-204-20200107-AlN_10%
IBD-205-20200108-AlN_40%
IBD-206(T)-20200220
IBD-207(T)-20200224
IBD-208(T)-2020022501
IBD-209(T)-2020022502
IBD-210(T)-20200226
IBD-211(T)-20200715
IBD-212(T)-20200716
IBD-213-20200803-AlN 30 nm
IBD-214-20201222
IBD-215-20201223
IBD-216(T)-20210112
IBD-217-20210304
IBD-218(T)-20210307
IBD-219(T)-20210307
IBD-220(T)-20210318
IBD 221~228
IBD-221(T)-20210406
IBD-222(T)-20210406
IBD-223(T)-20210407
IBD-224(T)-20210407
IBD-228(T)-20210902
IBD 229~240 (2")
IBD-229(T)-20211105
IBD-230(T)-20211118
IBD-231(T)-20211220
IBD-232(T)-20220110
IBD-233(T)-20220125
IBD-234(T)-20220316
IBD-235(T)-20220321
IBD-236(T)-20220328
IBD-237(T)-20220330
IBD-238(T)-20220401
IBD-239(T)-20220420
IBD system
IBD I-V curve
Sample List
Turbo (Osaka)
備品及基板
3C-SiC Hall bar measurements
4H-SiC measurements
Guns of IBD
IBD-230
Jack's sample-20150312
pump maintenance
基板
石英玻璃視窗 of M.C.
腔體設計
Al target gun 1
Nb target_gun2
20151217
20160201
20180223
IBD 1~20
NbN Multi-direction Test
20171219 NbN Multi-direction Test
20171221 NbN Multi-direction Test
20180417 NbN Multi-direction Test
20180515 Multi-direction Test
NbN Reference
Raman
Summary of the NbN films
HEB Mixers
Antenna Design
1.4 THz
1.5 THz
Fabrication
20150721
20150728
20150810
20150827
20150917
20151116
20151222
20151229
20160121
20160215
20160418
20160426
20160523
20160629
20160707
20160905 Graphene HEB
20161116 ( 2.2 nm NbN )
20170216
20170307
20170313-HEB-1st key (IBD-86-1,3)
20170322 (IBD86-1)
20170425 (IBD-87-1)
20170609 (IBD-100-3)
2018 Spiral HEB
HEB TEST
HEB EBL Calibration
Contact Pad
E-Gun New Holder Test
Inner Antenna
HEB-Ni-Test
HEB-Ni-3nm-20181008
HEB-Ni-IBD100-30A
HEB-Ni-IBD113-47A
HEB-Ni-IBD119-40A
ICPRIE etching test
NbN Film: M2
M2
Condition comparison
Guns of M2
M2 I-V Curve
Sample List
20150401
20150601
20150626
20150629
20150630
20150701
20150708
20150714
20150825
20150921
20150923
20151005
20151007
20151013
20151014
20151021
20151028
20151029
20151104
20151111
20151112-1
20151112-2
20151113
20151118
20151130
20151201
20151207
20160115
20160201
20160204
20160204
20160223
20160223
20160223-2
2016022402
2016022403
2016022404
2016022405
20160225
2016030401
2016030403
2016031401
2016031402
2016031403
2016031404
2016031601
2016031602
2016031603
2016031604
2016032101
2016032102
2016032103
2016032104
20160325
2016032801
2016032802
2016032803
2016032901
2016032902
2016032903
2016042001
2016042002
20160520
2016052002
20160523
20160526
7.4 mtorr
7.7 mtorr
8.5 mtorr
NbN_CA3
20151217(-run No.293)
20151222 (Volt.-time curve)
Ar/N2: 12/3.3 7.7 mtorr
Ar/N2: 12/3.3 8.5 mtorr
Ar/N2: 12/3.5 8.5 mtorr
Ar/N2: 12/4.0 8.5 mtorr
M2-277-20151118-1
M2-278-20151118-2
OM
OM
OM
OM
OM
OM
OM
OM
OM
OM (HR-Si)
OM (HR-Si)
OM (HR-Si)
OM (Si)
OM (Si)
OM (SiO2)
OM photo
OM photos
SEM
SEM
SEM
SEM
SEM
Tc
Proximity effect at contact pad
20170831 Proximity Effect Test
20171005 Proximity Effect Test
Silicon Lens
Hemispheroid
Semiellipsoid
1.4 pattern
1.5 pattern
Defocus
Focus
LO data sheet
Measurement
AFM
3C-SiC
3C-SiC on HRSi
4H-SiC epilayer (n-type) on 4H-SiC
4H-SiC substrate
IBD-63-1.5 nm NbN
IBD-66- 5.7 nm NbN
IBD-67- 4.7 nm NbN
IBD-68-2.2 nm NbN
IBD-72-2.6 nm NbN
IBD-73-1.9 nm NbN
IBD-74-1.3 nm NbN
IBD-78-2.7 nm NbN
IBD-79-5 nm NbN
roughness of Nb
25 nm AlN/Si substrate
EDS by TEM
IBD-112
IBD-127
IBD-178 (T)_NCKU
EELS
IBD-101
IBD-109
IBD-127
20171220_中研院物理所
20180108_NCKU
SAO240-1-5-TC 110~220 C
20180108_NCKU
20180212 NCKU
SAO240-1-5-TF no anneal
Hall measurement by PPMS
IBD-54
HRTEM
IBD-041
IBD-41-40"-NbN/MgO
IBD-41-40"-NbN/SiC
IBD-068
IBD-079
IBD-79-2
IBD-79-3
IBD-101_3 nm NbN/3CSiC
IBD-106_3.7nm NbN/3CSiC
IBD-107_4nm NbN/3CSiC
IBD-109_2.5 nm NbN/3CSiC
IBD-110_1.9nm NbN/3CSiC
IBD-112_4.6 nm NbN/3CSiC
IBD-113_4.8 nm NbN/3CSiC
IBD-114_5nm NbN/3CSiC
IBD-124_4nm NbN/4HSiC
IBD-127_20nm NbN/4HSiC(30/3.3)
IBD-150_20nm NbN/4HSiC (30/2.9)
IBD-151_20nm NbN/4HSiC(30/3.7)
IBD-153_10 nm NbN on 4H-SiC
IBD-178 (T)
IBD-206(T)-4_2nm NbN/4H-SiC
IBD-206(T)-7_2nm NbN/3C-SiC
IBD-210(T)-4_6nm NbN/4H-SiC
IBD-210(T)-7_6nm NbN/3C-SiC
SAO240-1-5-TC 110~220 C
SAO240-1-5-TF no anneal
OM
Raman spectrum
(001) 3C-SiC/Si
(001) 4H-SiC
IBD-153
IBD-162
IBD-171(T)
IBD-171(T)_5nm delta-NbN/3CSiC/Si
IBD-171(T)_5nm eps-NbN/4H-SiC
IBD-173 (T)
IBD-176 (T)
IBD-177 (T)
IBD-178 (T)
IBD-179 (T)
IBD-180 (T)
IBD-181 (T)
IBD-182 (T)
IBD-189 (T)
IBD-189 (T)_10 nm epsi-NbN/4HSiC
IBD-189(T)_10 nm de-NbN/3CSiC/Si
Powder_delta NbN
Powder_epsilon NbN
SEM
20200819 SiO2 Thickness SEM
20200826 SiO2 2000 A-SEM
IBD
3C-SiC/ HRSi
3C-SiC/Si
4H-SiC
M2
Spectrum
database
SQUID
IBD-127
Two-channel R-T system
XRD
jcpds card
sample list
IBD
programs of PW3071
fused quartz
HRSi
IBD-127
IBD-20
IBD-21
IBD-22
IBD-23
IBD-24
IBD-25
IBD-26
IBD-27
IBD-28
IBD-29
IBD-30
IBD-31
IBD-32
IBD-33
IBD-34
IBD-35
IBD-36
IBD-37
IBD-38
IBD-50
IBD-51
IBD-53
IBD-54
IBD-55
IBD-56
IBD-57
IBD-58
IBD-59
IBD-60
Jack_N2=1.2_20141007
Jack_N2=1.5_20141006
Jack_N2=1.8_20140926
Jack_N2=2.1_20140930
Jack_N2=2.4_20141003
Jack_N2=2.7_20141002
Jack_N2=3_20141008
MgO
MgO_new_20160519
program 4
program 5
SiC_no BOE etching
SiO2
Meta-material
20160805
20160808
20160811
20160818
20160819
20160905
20160906
20160930
20161202 Meta G = 3.0
20161219
20161220
Reference
RLC circuit phase shift calculations
Simple Example
Simulations by HFSS
NbN Ion gating device
20190716 NbN Ion gating
20190801 NbN Ion gating
NbN Noise Thermometer
20200717 NbN NT-1UC/2UC (3C, HEB Type)
NTHU Al (Thermal Coater)
On-Chip Spectrometer
References
Simulation
CPW
Devices
Filter
Inverted transmission line
KID
RF Choke
Simulation result
SiO2 side ground combine
Slot antenna
papers
2017
Epitaxial growth of few monolayers superconducting NbN films on a 3C-SiC/Si substrate with high critical temperature
Project weekly report
ALMA-report
ALMA weekly report - 2016
ALMA weekly report - 2017
ALMA weekly report - 2018
ALMA-annual report
SMA-report
SMA weekly report - 2016
SMA weekly report 2017
Proposals
summer student program
2016
SAFARI calibration source
FTS Adjustment
Integrating sphere
20190510 QMC Measurement
20190718-Comparison of different IS
20201229 New 80 mm IS etching
20210128 Al Plate BOE
20210309 new 80mm IS-1 BOE
5083H112-Sphere
8 cm IS
Al plate - OM check
AL6063-Sphere
IS Uniformity test
20200109-IS 50mm-SB+etch-Uniformity test
20200116 50mm-SB+etch-Uniformity test
20200218 IS 80mm-SB+etch-uniformity test
IS-holes & grid
PR on Al plate Test
PR on new 5083 etching
references
References
SB+Etching on new 5083
Meetings and Report
20170208 meeting with SRON
20180530 - SPICA Consortium Meeting
20191027-consortium meeting
microlamp-simulation
ML testing
CS-ML-1-2-1 B4-4
CS-ML-1-2-1 C4-1
CS-ML-1-2-1 C6-1
CS-ML-1-2-2 C9-4
CS-ML-1-2-2-C9-2
CS-ML-1-7-1 C5-2
CS-ML-1-7-1 C5-2 raw data
CS-ML-H-1-1
Micro-Lamp EBL Test Mask
process testing for CS
CS-ML-1-10
CS-ML-1-2
CS-ML-1-4
CS-ML-1-4 DC Measurement
CS-ML-1-5
CS-ML-1-6
CS-ML-1-7
CS-ML-1-8
CS-ML-1-9
CS-ML-Emissivity-test
Progress report
references
SEM Observations
CaS
20210720
FeSe
SEM operation record
Probe Current
Single Photon Detector
20200331 SPD Test
20210120 SPD Test
20210126 SPD Test
20210223 SPD Test
20210308 SPD Test
20210413 SPD Test
20210517 SPD Test (IoP)
SPD EBL Mask
SPD-1 (20210308 SPD)
SPD-2-IoP (20210517 SPD-IoP)
SPD-3 (20210730 SPD)
SPD-4 (IBD-228-4)
SIS Mixers
20151002 SIS data summery
Al-40-40 mag test
Anneal test
Re-calculate data
APSOS
APSOS-B1
APSOS-B2
APSOS-B2-2-20180925
APSOS-B2-MOD1-1
APSOS-B2-MOD1-2
HARP-01
HARP-01-1
A2_1_Dipstick
A2_1_RRT
RF Test
Raw Data
HARP-01-2
HARP-01-3
IDP
JTWPA
JTWPA-1-1
JTWPA-1-2
JTWPA-1-3
JTWPA-1-4
JTWPA-1-5
JTWPA-1-6
JTWPA-1-7
JTWPA-1-8
JTWPA-1-9
JTWPA-1-10
JTWPA-1-11
JTWPA-1-12
KVN-NTHU-1
KVN-NTHU-1-6
KVN-NTHU-1-7
KVN-NTHU-1-8
KVN-NTHU-1-9
PMO
PMO-100G-20210202
PMO-BAND-2-2
PMO-Nb100G-20200505
PMO-Nb100GHZ-20190628
PMO-SIS-230-345-660-1-1
QC-MIXER
QC-MIXER-1-1
QC-MIXER-1-2
QC-MIXER-1-3
QC-MIXER-1-4
SAO200-4
SAO200-4-10
SAO240-1
SAO240-1-2
SAO240-1-4
SAO240-1-5
SAO240-1-6
SAO240-1-7
SAO240-1-8
SAO240-1-9
SAO300-2
SAO300-2-6
SAO320 Resistance Patterns
20170825 SAO320 EBL Test
20170829 SAO320 EBL Test
SAO400-1A
SAO400-1A-10
SAO400-1A-12
SAO400-1A-8
SAO400-1A-9
SMANTHU-1
SMANTHU-1-11
SMANTHU-1-12
SMANTHU-1-13
SMANTHU-1-14
SMANTHU-1-16
SMANTHU-1-18
SMANTHU-1-19
SMANTHU-1-20
SMANTHU-1-21
SMANTHU-1-22
SMANTHU-1-23
SMANTHU-1-24
SMANTHU-1-25
SMANTHU-1-26
SMANTHU-1-27
SMANTHU-1-28
SMANTHU-1-29
SMANTHU-1-30
SMANTHU-1-31
SMANTHU-1-32
SMANTHU-1-33
wSMA
wSMA-240-1-1
wSMA-240-1-10
wSMA-240-1-9
wSMA-240-2-1
wSMA-240-2-11
wSMA-240-2-12
wSMA-240-2-2
wSMA-240-2-3
wSMA-240-2-4
wSMA-240-2-5
wSMA-240-2-6
wSMA-240-2-7
wSMA-240-2-8
wSMA-240-2-9
wSMA240-1-2
wSMA240-1-3
wSMA240-1-4
wSMA240-1-5
wSMA240-1-7
wSMA240-1-8
wSMA-HB
wSMA-HB-1-1
wSMA-HB-1-2
wSMA-HB-1-3
wSMA-HB-1-4
wSMA-HB-1-5
wSMA-HB-1-6
wSMA-HB-1-7
wSMA-HB-1-8
wSMA-HB-1-9
wSMA-HB-1-10
wSMA-HB-1-11
wSMA-HB-1-12
wSMA-HB-1-13
wSMA-HB-1-14
wSMA-HB-1-15
wSMA-HB-1-16
T-M3-RF clean test for wiring-20220509
T-M3-RF clean test for wiring-20220510
T-M3-RF clean test for wiring-20220510
wSMA-HB-1-17
wSMA-HB-1-18
wSMA-HB-1-19
wSMA-200-1-3
wSMA-200-1-4
wSMA-200-1-5
wSMA200-1-1
wSMA200-1-2
wSMA-240-2
wSMA-240-2-13
wSMA-240-2-14
wSMA-240-2-15
wSMA-240-2-16
wSMA-240-2-17
wSMA-240-2-18
JJ-CL-1
JJ-CL-1-1
JJ-CL-1-2
JJ-CL-1-3
JJ-CL-1-4
JJ-CL-1-6
KVN230-1
KVN230-1-1
KVN230-1-2
SSQ-STM
SSQ-STM-1-23
SSQ-STM-1-24
superconduting 3td-device
3td-16
3td-17
3td-24
topological device
20150522
Calibration
TWPA
KITWPA
KITWPA-1 (IBD-231)
KITWPA-2 (IBD-231)
KITWPA-3-NbTiN (T-M2-NbTiN-13)
KITWPA-4-NbTiN (T-M2-NbTiN-28)
User Manual
Waveguide Roughness
Al Waveguide Test
Nb-Coated Waveguide
Weak Link
Weak Link EBL Test
20171109 Weak link Test
20171121 Weak link Test
20171205 Weak Link Test
20180119-Weak Link Test
Weekly report
Angel Lou Dagala
APing
CHLin
CLwang
20210628-CuO-Si-400/900 Pulse
ASIP-20210511 SiN ICPRIE
Faith Marie (upload by Helen)
H. W. Chang (Helen)
2016-2019
2020-2021
2022-2023
Hsun Hsieh
Thesis
2018.06.28 Oral Defense
Figures and Tables
Origin Files
Reference
Proximity Effect
Quantum Size Effect
Scaling Law
Jimmy
2015
2016
2017
2019
2020
KY
Shih-Kai Ho
Shou-Hsien
20161011_lunch talk
ADS_project
PL1515
PP1015
Conference paper and PPT
2014 EARX 15th PPT
2015 EARX 16th PPT
2016 AP-RASC PPT
2016 RFIT PPT
cryogenic system calibration
IF amplifier
WIN_015_LNPHEMT
WIN_025_PHEMT
WIN_PP1015
Q-band LNA
WIN_015_LNPHEMT
WIN_PP1015
housing
LNA_device2F100um
LNA_device2F75um
Q-band mixer
OMMIC_70MHEMT_mixer
WIN_mixer
WIN_015_LNPHEMT
2-stage mixer
3-stage mixer
housing
housing
Ting-Hang Pei
Trang
Yenyu
YP
Sample list and test result
system calibration and ability
AZ4620 test
KOH-wet etch test
spin coater
UHV Magnetron Sputtering Deposition System
20160224-FH7500rpm-test
OMT record
T-AZ4620-20180830-1
T-AZ4620-20180830-2
T-AZ4620-20180903-1
T-AZ4620-20180904-1
T-AZ4620-20180906-1
T-CS-ML-KOH-20200812
T-Deep RIE-20180925
T-Deep RIE-20181025
T-Nb net-20181129
T-Nb-net-20181227-no glue
YRH
1.5 THz Receiver Cartridge
CLNAs
LO Module
Measurement System
Power Distributor
Beam Alignment
CITLF4
LNF CLNA
Testing of HEB-20170322-B
Testing of HEB-20170322-D
Testing of HEB-20170425-B
Testing of HEB-20170425-D
Testing of HEB-20170609-D
Testing of HEB-Ni-20180622-3C
Testing of HEB-Ni-20180622-4B
Testing of HEB-Ni-20181008-60
TX-206
2016 THz meeting
2017 THz meeting
2018 THz meeting
Integrating sphere for SAFARI calibration source
FTIR
OM Images
Cold Detector
SS0710-AlO1214-Flat
SS0710-AlO1214-IS
YJ
wSMA project
wSMA-PT-DP
OMT
OMT-1
OMT-2
layout and mask
OMT test fixture
OMT-I-SiO2-20161014
OMT-KOH-etch test-20160922
OMT_simulation
T-ICP-20170223
T-KOH-20161003
T-OMT-20161024
T-OMT-20161123
T-OMT-Au-20161123-6
OM (Before Lapping)
T-OMT-20161130
T-OMT-Au-20161228
T-OMT-Au-20170419
T-OMT-I-SiO2-20161017
T-OMT-ICP test-20170425
wSMA-OMT-2-1
wSMA-OMT-2-2
wSMA-OMT-2-3
wSMA-OMT-2-4
Si attenuator
references
Si attenuator -1
Si attenuator -1 mask layout
Si attenuator -1-1
WSMA-SA-1-2-3-HB-test
wSMA-SA-1-process data sheet
Si directional coupler
simulation
test
T-wSMA-17DB-20190819
T-wSMA-17DB-20190830
wSMA-17DB-1
wSMA-17DB-2
wSMA-17dB-2-2
wSMA-17DB-2-3
wSMA-17dB-2-2-1
wSMA-17dB-2-2-1-photos
wSMA-DC2
wSMA-DC3
wSMA-DC-3-3
wSMA-DC3-1
wSMA-DC3-2
photos
photos
wSMA-DC3-1-1-HB
wSMA-DC3-2-1-LB
wSMA-DC4
wSMA-DC5
wSMA- cryogenic IR Filter
SMA-IRF-17-3-20180507
SMA-IRF-17-3-20180509
SMA-IRF-1mm-quartz-thickness test
T-IRF-20170505
T-SMA-IRF-20170327
T-SMA-IRF-20170918-1&2
T-SMA-TRF-20170710-4Inch test
wSMA-diplexer
YBCO
YBCO etching(Ion miller)
YBCO etching(Ion miller)-OM
YBCO SEM Pattern
EBL pattern - OM
SEM Dose Test
差勤卡
2015
APing
CLWang
Jimmy
KY
Yenyu
研磨機保養與使用
LO-Dist ver1 Process Data Sheet
Run7
Run8
O-ring test in KOH wet etching
Lab
Achievements
Clean Room Facilities
Clean Room Photos
SIS Mixer Performance Evaluation
Software
Sub-mm/THz Fourier Transform Spectrometer
Member
Ming-Jye Wang
papers
Poster
2016 APRASC - Korea
2017 PSROC annual meeting
Presentation
Tech Lunch Talk
wSMA PCB Measurement
檢點表
SDL
實驗室簡介
Device gallery
experiment control program
DC SQUID Electronics XXF-1
Facilities
1.5 THz Transmitter (兆赫波光源組)
3D Laser confocal microscope and profile analysis software (3D雷射共軛焦顯微鏡及輪廓分析軟體)
Alpha Step Profiler (薄膜測厚儀)
Alpha Step Profiler (表面應力及型狀測試儀)
Automatic Dicing Saw (晶片切割儀器)
Cartridge Test Cryostat (低溫恆溫器)
Composite Germanium Bolometer Detector System (複合鍺輻射熱測定器偵測系統)
DUV Mask Aligner for Both Sides Alignment (雙面對準深紫外曝光機)
Electron Beam Evaporator (電子束蒸鍍機)
High speed x-ray detector (X光低溫繞射儀之高速偵測器)
Inductively Coupled Plasma Reactive Ion Etcher (電感耦合電漿離子反應式蝕刻機)
Ion Beam Deposition System (氧化物濺鍍系統)
Ion Etcher System (離子蝕刻系統)
Lapping and Polishing Machine for THz Beam Splitters (兆赫波分光器鏡面磨製機)
Mask Aligner (光罩對準機主體及其他配件)
Metal Films Deposition System (薄膜濺鍍機)
Multi-chamber Sputtering System (多腔體濺鍍系統)
Reactive Ion Etching System (反應式離子蝕刻系統)
Sub-Millimeter-wave Fourier Transformation Spectrometer (次毫米波傅立葉轉換光譜儀)
UHV Magnetron Sputtering Deposition System (超高真空磁控濺鍍系統)
Thermal Field Emission Scanning Electron Microscope (高解析熱電子型場發射掃描式電子顯微鏡)
File
340GHz coupler simulation
340GHz power divider
4-pixel Cartridge
Au Reflector
Beam Splitter
TE Mode
Measurement
Raw Data
TM Mode
Measurement
Four-pixel Lo power distributor
Experiments
20190611
20190618
20190703
Clean room maintainance
E-Gun
Conferences
2015 EA Rx workshop
2016 JCMT Instrument Workshop
2020 21th EA Rx workshop
TPS2020 meeting
EBL
20180131 EBL Path Test
20180305-Line pattern Test
20180308-Line pattern Test
20180322 Line Pattern Test
20180331 Line Pattern Test
201809 Contact pad gap test
20190802 EBL Test
20200226 2A Line Test
20200406 2A Line Test
20201029 SMANTHU-Ni Block Test
20201110 4A4000rpm test on Quartz & Si
20201112 4A 4000 rpm Test on Si
20201112 SMAHTHU-1-7 Test Ni Block
20201214 EBLTest-PMMA on Al
ASPhy device
Calibration
20150618
20150709
20150824
20151015
20151027
20151103
20151110
20160222
20160303
20160310
20160314
20160321
20160324
20160406
20160411
PMMA
Facility
M3 - 6 inch system
1 廠驗報告_FSE 20210602
2 交機及到貨簽收單_20210610
3 安裝_ (before 20210716)
4 system operation test
5 thin film deposition test
Sample List of M3
M3-001-Nb-20210629
M3-002-Nb-20210701
M3-003-Nb-20210702
M3-004-Al-20210723
M3-005-Nb-20210727
M3-006-Al-2021072702
M3-007-Al-20210728
M3-008-Al-2021072802
FeSe Nanowire & Nanosheet
20190620
20200215
20210618 IoP-KY-FeSe
FeSeTe thin film
Graphene Devices
20190723 Graphene Devices
20190821 Graphene device
20200316 Graphene BowTie
20200323 Graphene BowTie (Si)
20200608 Graphene BowTie (SiO2/Si)
NbN Film: IBD
IBD 1~20
IBD-002-20160106
IBD-004-20160130
IBD-005-20160201
IBD-006-20160202-1
IBD-007-20160202-2
IBD-008-20160203
IBD-019-20160225
IBD-020-20160314
IBD-003-20160113
IBD 21~40
IBD-021-20160316
IBD-022-20160321
IBD-023-20160323
IBD-024-20160329
IBD-025-20160420
IBD-026-20160421
IBD-027-20160426
IBD-028-20160427
IBD-029-20160428
IBD-030-20160429
IBD-031-20160511
IBD-032-20160512
IBD-033-20160516
IBD-034-20160517
IBD-035-2016051801
IBD-036-2016051802
IBD-037-20160523
IBD-038-20160524
IBD-039-20160601
IBD-040-20160602
IBD 41~60
IBD-041-20160603
IBD-042-20160604
IBD-044-20160706
IBD-045-20160713
IBD-046-20160714
IBD-047-20160719
IBD-048-20160720
IBD-049-20160726
IBD-050-20160727
IBD-051-20160728
IBD-052-20160728
IBD-053-20160802
IBD-054-2016080301
IBD-055-2016080302
IBD-056-2016080401
IBD-057-2016080402
IBD-058-20160810
IBD-059-2016081002
IBD-060-20160811
IBD 61~80
IBD-061-20160922
IBD-062-20161012
IBD-063-20161013
IBD-064-20161020
IBD-065-20161024
IBD-066-20161102
IBD-067-20161103
IBD-068-20161109
IBD-072-2016111601
IBD-073-206111602
IBD-074-20161117
IBD-076-20161124
IBD-077-20161216
IBD-078-20161219
IBD-079-20161227
IBD-080-20170112
IBD 81~100
IBD-081-20170124
IBD-082-20170125
IBD-083-20170216
IBD-084-20170222
IBD-085-20170223
IBD-086-20170310
IBD-087-20170418
IBD-088-20170425_AlN
IBD-089-20170428
IBD-090-20170503
IBD-091-20170504_65Å AlN
IBD-092-20170511
IBD-093-20170516
IBD-094-2017051801
IBD-095-2017051802
IBD-096-20170519
IBD-097-20170605
IBD-098-20170606
IBD-099-20170607
IBD-100-20170608
IBD 101~120
IBD-101-2017061201
IBD-102-2017061202
IBD-103-20170614
IBD-104-20170620
IBD-105-20170621
IBD-106-2017062201
IBD-107-2017062202
IBD-108-20170628
IBD-109-20170629
IBD-110-20170629
IBD-111-2017063001
IBD-112-2017063002
IBD-113-2017071201
IBD-114-2017071202
IBD-115-20170713
IBD-116-20170718-AlN
IBD-117-20170718
IBD-118-20170719
IBD-119-20170720
IBD-120-20170721
IBD 121~140
IBD-121-20170722
IBD-122-20170722
IBD-123-20170902
IBD-124-20170903
IBD-125-20170904
IBD-126-20170914-AlN
IBD-127-20170923
IBD-128-20170925
IBD-129-20170925
IBD-130-20170926
IBD-131-20171017-AlN
IBD-132-20171020
IBD-133-20171025
IBD-134-20171026
IBD-135-20171102
IBD-136-20171213
IBD-137-20171227
IBD-138-20171228
IBD-139-20171228
IBD-140-20171229
IBD 141~160
IBD-143-20180412
IBD-144-20180427
IBD-145-20180508-AlN
IBD-146-20180522-AlN
IBD-148-2018052301
IBD-149-2018052302
IBD-150-2018061401
IBD-151-2018061402
IBD-152-20180730
IBD-153-20180809
IBD-154-20180815-AlN 3nm
IBD-155-20180816
IBD-156-20180823
IBD-157-20180913
IBD-158-20181025-AlN
IBD-159-20181127
IBD-160-20181130
IBD 161~180
IBD-161-20181203
IBD-162-20181203
IBD-163-20190102-AlN 20 nm
IBD-164-20190226
IBD-165(T)-20190327
IBD-166(T)-20190418
IBD-167(T)-20190430
IBD-168-20190502-Al
IBD-169(T)-20190502
IBD-170(T)-20190516
IBD-171(T)-20190521
IBD-172(T)-20190521
IBD-173(T)-20190524
IBD-174(T)-20190528
IBD-175(T)-20190529
IBD-176(T)-20190604
IBD-177(T)-20190605
IBD-178(T)-20190606
IBD-179(T)-20190610
IBD-180(T)-20190611
IBD 181~200
IBD-181(T)-20190612
IBD-182(T)-20190613
IBD-189(T)-20190715
IBD-190(T)-20190923
IBD-191-20190924_TaN
IBD-192(T)-20190924
IBD-193(T)-20190926
IBD-194-20190926_TaN
IBD-196(T)-20191225
IBD 201~220
IBD-203-20200106-AlN_100%
IBD-204-20200107-AlN_10%
IBD-205-20200108-AlN_40%
IBD-206(T)-20200220
IBD-207(T)-20200224
IBD-208(T)-2020022501
IBD-209(T)-2020022502
IBD-210(T)-20200226
IBD-211(T)-20200715
IBD-212(T)-20200716
IBD-213-20200803-AlN 30 nm
IBD-214-20201222
IBD-215-20201223
IBD-216(T)-20210112
IBD-217-20210304
IBD-218(T)-20210307
IBD-219(T)-20210307
IBD-220(T)-20210318
IBD 221~228
IBD-221(T)-20210406
IBD-222(T)-20210406
IBD-223(T)-20210407
IBD-224(T)-20210407
IBD-228(T)-20210902
IBD 229~240 (2")
IBD-229(T)-20211105
IBD-230(T)-20211118
IBD-231(T)-20211220
IBD-232(T)-20220110
IBD-233(T)-20220125
IBD-234(T)-20220316
IBD-235(T)-20220321
IBD-236(T)-20220328
IBD-237(T)-20220330
IBD-238(T)-20220401
IBD-239(T)-20220420
IBD system
IBD I-V curve
Sample List
Turbo (Osaka)
備品及基板
3C-SiC Hall bar measurements
4H-SiC measurements
Guns of IBD
IBD-230
Jack's sample-20150312
pump maintenance
基板
石英玻璃視窗 of M.C.
腔體設計
Al target gun 1
Nb target_gun2
20151217
20160201
20180223
IBD 1~20
NbN Multi-direction Test
20171219 NbN Multi-direction Test
20171221 NbN Multi-direction Test
20180417 NbN Multi-direction Test
20180515 Multi-direction Test
NbN Reference
Raman
Summary of the NbN films
HEB Mixers
Antenna Design
1.4 THz
1.5 THz
Fabrication
20150721
20150728
20150810
20150827
20150917
20151116
20151222
20151229
20160121
20160215
20160418
20160426
20160523
20160629
20160707
20160905 Graphene HEB
20161116 ( 2.2 nm NbN )
20170216
20170307
20170313-HEB-1st key (IBD-86-1,3)
20170322 (IBD86-1)
20170425 (IBD-87-1)
20170609 (IBD-100-3)
2018 Spiral HEB
HEB TEST
HEB EBL Calibration
Contact Pad
E-Gun New Holder Test
Inner Antenna
HEB-Ni-Test
HEB-Ni-3nm-20181008
HEB-Ni-IBD100-30A
HEB-Ni-IBD113-47A
HEB-Ni-IBD119-40A
ICPRIE etching test
NbN Film: M2
M2
Condition comparison
Guns of M2
M2 I-V Curve
Sample List
20150401
20150601
20150626
20150629
20150630
20150701
20150708
20150714
20150825
20150921
20150923
20151005
20151007
20151013
20151014
20151021
20151028
20151029
20151104
20151111
20151112-1
20151112-2
20151113
20151118
20151130
20151201
20151207
20160115
20160201
20160204
20160204
20160223
20160223
20160223-2
2016022402
2016022403
2016022404
2016022405
20160225
2016030401
2016030403
2016031401
2016031402
2016031403
2016031404
2016031601
2016031602
2016031603
2016031604
2016032101
2016032102
2016032103
2016032104
20160325
2016032801
2016032802
2016032803
2016032901
2016032902
2016032903
2016042001
2016042002
20160520
2016052002
20160523
20160526
7.4 mtorr
7.7 mtorr
8.5 mtorr
NbN_CA3
20151217(-run No.293)
20151222 (Volt.-time curve)
Ar/N2: 12/3.3 7.7 mtorr
Ar/N2: 12/3.3 8.5 mtorr
Ar/N2: 12/3.5 8.5 mtorr
Ar/N2: 12/4.0 8.5 mtorr
M2-277-20151118-1
M2-278-20151118-2
OM
OM
OM
OM
OM
OM
OM
OM
OM
OM (HR-Si)
OM (HR-Si)
OM (HR-Si)
OM (Si)
OM (Si)
OM (SiO2)
OM photo
OM photos
SEM
SEM
SEM
SEM
SEM
Tc
Proximity effect at contact pad
20170831 Proximity Effect Test
20171005 Proximity Effect Test
Silicon Lens
Hemispheroid
Semiellipsoid
1.4 pattern
1.5 pattern
Defocus
Focus
LO data sheet
Measurement
AFM
3C-SiC
3C-SiC on HRSi
4H-SiC epilayer (n-type) on 4H-SiC
4H-SiC substrate
IBD-63-1.5 nm NbN
IBD-66- 5.7 nm NbN
IBD-67- 4.7 nm NbN
IBD-68-2.2 nm NbN
IBD-72-2.6 nm NbN
IBD-73-1.9 nm NbN
IBD-74-1.3 nm NbN
IBD-78-2.7 nm NbN
IBD-79-5 nm NbN
roughness of Nb
25 nm AlN/Si substrate
EDS by TEM
IBD-112
IBD-127
IBD-178 (T)_NCKU
EELS
IBD-101
IBD-109
IBD-127
20171220_中研院物理所
20180108_NCKU
SAO240-1-5-TC 110~220 C
20180108_NCKU
20180212 NCKU
SAO240-1-5-TF no anneal
Hall measurement by PPMS
IBD-54
HRTEM
IBD-041
IBD-41-40"-NbN/MgO
IBD-41-40"-NbN/SiC
IBD-068
IBD-079
IBD-79-2
IBD-79-3
IBD-101_3 nm NbN/3CSiC
IBD-106_3.7nm NbN/3CSiC
IBD-107_4nm NbN/3CSiC
IBD-109_2.5 nm NbN/3CSiC
IBD-110_1.9nm NbN/3CSiC
IBD-112_4.6 nm NbN/3CSiC
IBD-113_4.8 nm NbN/3CSiC
IBD-114_5nm NbN/3CSiC
IBD-124_4nm NbN/4HSiC
IBD-127_20nm NbN/4HSiC(30/3.3)
IBD-150_20nm NbN/4HSiC (30/2.9)
IBD-151_20nm NbN/4HSiC(30/3.7)
IBD-153_10 nm NbN on 4H-SiC
IBD-178 (T)
IBD-206(T)-4_2nm NbN/4H-SiC
IBD-206(T)-7_2nm NbN/3C-SiC
IBD-210(T)-4_6nm NbN/4H-SiC
IBD-210(T)-7_6nm NbN/3C-SiC
SAO240-1-5-TC 110~220 C
SAO240-1-5-TF no anneal
OM
Raman spectrum
(001) 3C-SiC/Si
(001) 4H-SiC
IBD-153
IBD-162
IBD-171(T)
IBD-171(T)_5nm delta-NbN/3CSiC/Si
IBD-171(T)_5nm eps-NbN/4H-SiC
IBD-173 (T)
IBD-176 (T)
IBD-177 (T)
IBD-178 (T)
IBD-179 (T)
IBD-180 (T)
IBD-181 (T)
IBD-182 (T)
IBD-189 (T)
IBD-189 (T)_10 nm epsi-NbN/4HSiC
IBD-189(T)_10 nm de-NbN/3CSiC/Si
Powder_delta NbN
Powder_epsilon NbN
SEM
20200819 SiO2 Thickness SEM
20200826 SiO2 2000 A-SEM
IBD
3C-SiC/ HRSi
3C-SiC/Si
4H-SiC
M2
Spectrum
database
SQUID
IBD-127
Two-channel R-T system
XRD
jcpds card
sample list
IBD
programs of PW3071
fused quartz
HRSi
IBD-127
IBD-20
IBD-21
IBD-22
IBD-23
IBD-24
IBD-25
IBD-26
IBD-27
IBD-28
IBD-29
IBD-30
IBD-31
IBD-32
IBD-33
IBD-34
IBD-35
IBD-36
IBD-37
IBD-38
IBD-50
IBD-51
IBD-53
IBD-54
IBD-55
IBD-56
IBD-57
IBD-58
IBD-59
IBD-60
Jack_N2=1.2_20141007
Jack_N2=1.5_20141006
Jack_N2=1.8_20140926
Jack_N2=2.1_20140930
Jack_N2=2.4_20141003
Jack_N2=2.7_20141002
Jack_N2=3_20141008
MgO
MgO_new_20160519
program 4
program 5
SiC_no BOE etching
SiO2
Meta-material
20160805
20160808
20160811
20160818
20160819
20160905
20160906
20160930
20161202 Meta G = 3.0
20161219
20161220
Reference
RLC circuit phase shift calculations
Simple Example
Simulations by HFSS
NbN Ion gating device
20190716 NbN Ion gating
20190801 NbN Ion gating
NbN Noise Thermometer
20200717 NbN NT-1UC/2UC (3C, HEB Type)
NTHU Al (Thermal Coater)
On-Chip Spectrometer
References
Simulation
CPW
Devices
Filter
Inverted transmission line
KID
RF Choke
Simulation result
SiO2 side ground combine
Slot antenna
papers
2017
Epitaxial growth of few monolayers superconducting NbN films on a 3C-SiC/Si substrate with high critical temperature
Project weekly report
ALMA-report
ALMA weekly report - 2016
ALMA weekly report - 2017
ALMA weekly report - 2018
ALMA-annual report
SMA-report
SMA weekly report - 2016
SMA weekly report 2017
Proposals
summer student program
2016
SAFARI calibration source
FTS Adjustment
Integrating sphere
20190510 QMC Measurement
20190718-Comparison of different IS
20201229 New 80 mm IS etching
20210128 Al Plate BOE
20210309 new 80mm IS-1 BOE
5083H112-Sphere
8 cm IS
Al plate - OM check
AL6063-Sphere
IS Uniformity test
20200109-IS 50mm-SB+etch-Uniformity test
20200116 50mm-SB+etch-Uniformity test
20200218 IS 80mm-SB+etch-uniformity test
IS-holes & grid
PR on Al plate Test
PR on new 5083 etching
references
References
SB+Etching on new 5083
Meetings and Report
20170208 meeting with SRON
20180530 - SPICA Consortium Meeting
20191027-consortium meeting
microlamp-simulation
ML testing
CS-ML-1-2-1 B4-4
CS-ML-1-2-1 C4-1
CS-ML-1-2-1 C6-1
CS-ML-1-2-2 C9-4
CS-ML-1-2-2-C9-2
CS-ML-1-7-1 C5-2
CS-ML-1-7-1 C5-2 raw data
CS-ML-H-1-1
Micro-Lamp EBL Test Mask
process testing for CS
CS-ML-1-10
CS-ML-1-2
CS-ML-1-4
CS-ML-1-4 DC Measurement
CS-ML-1-5
CS-ML-1-6
CS-ML-1-7
CS-ML-1-8
CS-ML-1-9
CS-ML-Emissivity-test
Progress report
references
SEM Observations
CaS
20210720
FeSe
SEM operation record
Probe Current
Single Photon Detector
20200331 SPD Test
20210120 SPD Test
20210126 SPD Test
20210223 SPD Test
20210308 SPD Test
20210413 SPD Test
20210517 SPD Test (IoP)
SPD EBL Mask
SPD-1 (20210308 SPD)
SPD-2-IoP (20210517 SPD-IoP)
SPD-3 (20210730 SPD)
SPD-4 (IBD-228-4)
SIS Mixers
20151002 SIS data summery
Al-40-40 mag test
Anneal test
Re-calculate data
APSOS
APSOS-B1
APSOS-B2
APSOS-B2-2-20180925
APSOS-B2-MOD1-1
APSOS-B2-MOD1-2
HARP-01
HARP-01-1
A2_1_Dipstick
A2_1_RRT
RF Test
Raw Data
HARP-01-2
HARP-01-3
IDP
JTWPA
JTWPA-1-1
JTWPA-1-2
JTWPA-1-3
JTWPA-1-4
JTWPA-1-5
JTWPA-1-6
JTWPA-1-7
JTWPA-1-8
JTWPA-1-9
JTWPA-1-10
JTWPA-1-11
JTWPA-1-12
KVN-NTHU-1
KVN-NTHU-1-6
KVN-NTHU-1-7
KVN-NTHU-1-8
KVN-NTHU-1-9
PMO
PMO-100G-20210202
PMO-BAND-2-2
PMO-Nb100G-20200505
PMO-Nb100GHZ-20190628
PMO-SIS-230-345-660-1-1
QC-MIXER
QC-MIXER-1-1
QC-MIXER-1-2
QC-MIXER-1-3
QC-MIXER-1-4
SAO200-4
SAO200-4-10
SAO240-1
SAO240-1-2
SAO240-1-4
SAO240-1-5
SAO240-1-6
SAO240-1-7
SAO240-1-8
SAO240-1-9
SAO300-2
SAO300-2-6
SAO320 Resistance Patterns
20170825 SAO320 EBL Test
20170829 SAO320 EBL Test
SAO400-1A
SAO400-1A-10
SAO400-1A-12
SAO400-1A-8
SAO400-1A-9
SMANTHU-1
SMANTHU-1-11
SMANTHU-1-12
SMANTHU-1-13
SMANTHU-1-14
SMANTHU-1-16
SMANTHU-1-18
SMANTHU-1-19
SMANTHU-1-20
SMANTHU-1-21
SMANTHU-1-22
SMANTHU-1-23
SMANTHU-1-24
SMANTHU-1-25
SMANTHU-1-26
SMANTHU-1-27
SMANTHU-1-28
SMANTHU-1-29
SMANTHU-1-30
SMANTHU-1-31
SMANTHU-1-32
SMANTHU-1-33
wSMA
wSMA-240-1-1
wSMA-240-1-10
wSMA-240-1-9
wSMA-240-2-1
wSMA-240-2-11
wSMA-240-2-12
wSMA-240-2-2
wSMA-240-2-3
wSMA-240-2-4
wSMA-240-2-5
wSMA-240-2-6
wSMA-240-2-7
wSMA-240-2-8
wSMA-240-2-9
wSMA240-1-2
wSMA240-1-3
wSMA240-1-4
wSMA240-1-5
wSMA240-1-7
wSMA240-1-8
wSMA-HB
wSMA-HB-1-1
wSMA-HB-1-2
wSMA-HB-1-3
wSMA-HB-1-4
wSMA-HB-1-5
wSMA-HB-1-6
wSMA-HB-1-7
wSMA-HB-1-8
wSMA-HB-1-9
wSMA-HB-1-10
wSMA-HB-1-11
wSMA-HB-1-12
wSMA-HB-1-13
wSMA-HB-1-14
wSMA-HB-1-15
wSMA-HB-1-16
T-M3-RF clean test for wiring-20220509
T-M3-RF clean test for wiring-20220510
T-M3-RF clean test for wiring-20220510
wSMA-HB-1-17
wSMA-HB-1-18
wSMA-HB-1-19
wSMA-200-1-3
wSMA-200-1-4
wSMA-200-1-5
wSMA200-1-1
wSMA200-1-2
wSMA-240-2
wSMA-240-2-13
wSMA-240-2-14
wSMA-240-2-15
wSMA-240-2-16
wSMA-240-2-17
wSMA-240-2-18
JJ-CL-1
JJ-CL-1-1
JJ-CL-1-2
JJ-CL-1-3
JJ-CL-1-4
JJ-CL-1-6
KVN230-1
KVN230-1-1
KVN230-1-2
SSQ-STM
SSQ-STM-1-23
SSQ-STM-1-24
superconduting 3td-device
3td-16
3td-17
3td-24
topological device
20150522
Calibration
TWPA
KITWPA
KITWPA-1 (IBD-231)
KITWPA-2 (IBD-231)
KITWPA-3-NbTiN (T-M2-NbTiN-13)
KITWPA-4-NbTiN (T-M2-NbTiN-28)
User Manual
Waveguide Roughness
Al Waveguide Test
Nb-Coated Waveguide
Weak Link
Weak Link EBL Test
20171109 Weak link Test
20171121 Weak link Test
20171205 Weak Link Test
20180119-Weak Link Test
Weekly report
Angel Lou Dagala
APing
CHLin
CLwang
20210628-CuO-Si-400/900 Pulse
ASIP-20210511 SiN ICPRIE
Faith Marie (upload by Helen)
H. W. Chang (Helen)
2016-2019
2020-2021
2022-2023
Hsun Hsieh
Thesis
2018.06.28 Oral Defense
Figures and Tables
Origin Files
Reference
Proximity Effect
Quantum Size Effect
Scaling Law
Jimmy
2015
2016
2017
2019
2020
KY
Shih-Kai Ho
Shou-Hsien
20161011_lunch talk
ADS_project
PL1515
PP1015
Conference paper and PPT
2014 EARX 15th PPT
2015 EARX 16th PPT
2016 AP-RASC PPT
2016 RFIT PPT
cryogenic system calibration
IF amplifier
WIN_015_LNPHEMT
WIN_025_PHEMT
WIN_PP1015
Q-band LNA
WIN_015_LNPHEMT
WIN_PP1015
housing
LNA_device2F100um
LNA_device2F75um
Q-band mixer
OMMIC_70MHEMT_mixer
WIN_mixer
WIN_015_LNPHEMT
2-stage mixer
3-stage mixer
housing
housing
Ting-Hang Pei
Trang
Yenyu
YP
Sample list and test result
system calibration and ability
AZ4620 test
KOH-wet etch test
spin coater
UHV Magnetron Sputtering Deposition System
20160224-FH7500rpm-test
OMT record
T-AZ4620-20180830-1
T-AZ4620-20180830-2
T-AZ4620-20180903-1
T-AZ4620-20180904-1
T-AZ4620-20180906-1
T-CS-ML-KOH-20200812
T-Deep RIE-20180925
T-Deep RIE-20181025
T-Nb net-20181129
T-Nb-net-20181227-no glue
YRH
1.5 THz Receiver Cartridge
CLNAs
LO Module
Measurement System
Power Distributor
Beam Alignment
CITLF4
LNF CLNA
Testing of HEB-20170322-B
Testing of HEB-20170322-D
Testing of HEB-20170425-B
Testing of HEB-20170425-D
Testing of HEB-20170609-D
Testing of HEB-Ni-20180622-3C
Testing of HEB-Ni-20180622-4B
Testing of HEB-Ni-20181008-60
TX-206
2016 THz meeting
2017 THz meeting
2018 THz meeting
Integrating sphere for SAFARI calibration source
FTIR
OM Images
Cold Detector
SS0710-AlO1214-Flat
SS0710-AlO1214-IS
YJ
wSMA project
wSMA-PT-DP
OMT
OMT-1
OMT-2
layout and mask
OMT test fixture
OMT-I-SiO2-20161014
OMT-KOH-etch test-20160922
OMT_simulation
T-ICP-20170223
T-KOH-20161003
T-OMT-20161024
T-OMT-20161123
T-OMT-Au-20161123-6
OM (Before Lapping)
T-OMT-20161130
T-OMT-Au-20161228
T-OMT-Au-20170419
T-OMT-I-SiO2-20161017
T-OMT-ICP test-20170425
wSMA-OMT-2-1
wSMA-OMT-2-2
wSMA-OMT-2-3
wSMA-OMT-2-4
Si attenuator
references
Si attenuator -1
Si attenuator -1 mask layout
Si attenuator -1-1
WSMA-SA-1-2-3-HB-test
wSMA-SA-1-process data sheet
Si directional coupler
simulation
test
T-wSMA-17DB-20190819
T-wSMA-17DB-20190830
wSMA-17DB-1
wSMA-17DB-2
wSMA-17dB-2-2
wSMA-17DB-2-3
wSMA-17dB-2-2-1
wSMA-17dB-2-2-1-photos
wSMA-DC2
wSMA-DC3
wSMA-DC-3-3
wSMA-DC3-1
wSMA-DC3-2
photos
photos
wSMA-DC3-1-1-HB
wSMA-DC3-2-1-LB
wSMA-DC4
wSMA-DC5
wSMA- cryogenic IR Filter
SMA-IRF-17-3-20180507
SMA-IRF-17-3-20180509
SMA-IRF-1mm-quartz-thickness test
T-IRF-20170505
T-SMA-IRF-20170327
T-SMA-IRF-20170918-1&2
T-SMA-TRF-20170710-4Inch test
wSMA-diplexer
YBCO
YBCO etching(Ion miller)
YBCO etching(Ion miller)-OM
YBCO SEM Pattern
EBL pattern - OM
SEM Dose Test
差勤卡
2015
APing
CLWang
Jimmy
KY
Yenyu
研磨機保養與使用
LO-Dist ver1 Process Data Sheet
Run7
Run8
O-ring test in KOH wet etching
Lab
Achievements
Clean Room Facilities
Clean Room Photos
SIS Mixer Performance Evaluation
Software
Sub-mm/THz Fourier Transform Spectrometer
Member
Ming-Jye Wang
papers
Poster
2016 APRASC - Korea
2017 PSROC annual meeting
Presentation
Tech Lunch Talk
wSMA PCB Measurement
檢點表
More
實驗室簡介
Device gallery
experiment control program
DC SQUID Electronics XXF-1
Facilities
1.5 THz Transmitter (兆赫波光源組)
3D Laser confocal microscope and profile analysis software (3D雷射共軛焦顯微鏡及輪廓分析軟體)
Alpha Step Profiler (薄膜測厚儀)
Alpha Step Profiler (表面應力及型狀測試儀)
Automatic Dicing Saw (晶片切割儀器)
Cartridge Test Cryostat (低溫恆溫器)
Composite Germanium Bolometer Detector System (複合鍺輻射熱測定器偵測系統)
DUV Mask Aligner for Both Sides Alignment (雙面對準深紫外曝光機)
Electron Beam Evaporator (電子束蒸鍍機)
High speed x-ray detector (X光低溫繞射儀之高速偵測器)
Inductively Coupled Plasma Reactive Ion Etcher (電感耦合電漿離子反應式蝕刻機)
Ion Beam Deposition System (氧化物濺鍍系統)
Ion Etcher System (離子蝕刻系統)
Lapping and Polishing Machine for THz Beam Splitters (兆赫波分光器鏡面磨製機)
Mask Aligner (光罩對準機主體及其他配件)
Metal Films Deposition System (薄膜濺鍍機)
Multi-chamber Sputtering System (多腔體濺鍍系統)
Reactive Ion Etching System (反應式離子蝕刻系統)
Sub-Millimeter-wave Fourier Transformation Spectrometer (次毫米波傅立葉轉換光譜儀)
UHV Magnetron Sputtering Deposition System (超高真空磁控濺鍍系統)
Thermal Field Emission Scanning Electron Microscope (高解析熱電子型場發射掃描式電子顯微鏡)
File
340GHz coupler simulation
340GHz power divider
4-pixel Cartridge
Au Reflector
Beam Splitter
TE Mode
Measurement
Raw Data
TM Mode
Measurement
Four-pixel Lo power distributor
Experiments
20190611
20190618
20190703
Clean room maintainance
E-Gun
Conferences
2015 EA Rx workshop
2016 JCMT Instrument Workshop
2020 21th EA Rx workshop
TPS2020 meeting
EBL
20180131 EBL Path Test
20180305-Line pattern Test
20180308-Line pattern Test
20180322 Line Pattern Test
20180331 Line Pattern Test
201809 Contact pad gap test
20190802 EBL Test
20200226 2A Line Test
20200406 2A Line Test
20201029 SMANTHU-Ni Block Test
20201110 4A4000rpm test on Quartz & Si
20201112 4A 4000 rpm Test on Si
20201112 SMAHTHU-1-7 Test Ni Block
20201214 EBLTest-PMMA on Al
ASPhy device
Calibration
20150618
20150709
20150824
20151015
20151027
20151103
20151110
20160222
20160303
20160310
20160314
20160321
20160324
20160406
20160411
PMMA
Facility
M3 - 6 inch system
1 廠驗報告_FSE 20210602
2 交機及到貨簽收單_20210610
3 安裝_ (before 20210716)
4 system operation test
5 thin film deposition test
Sample List of M3
M3-001-Nb-20210629
M3-002-Nb-20210701
M3-003-Nb-20210702
M3-004-Al-20210723
M3-005-Nb-20210727
M3-006-Al-2021072702
M3-007-Al-20210728
M3-008-Al-2021072802
FeSe Nanowire & Nanosheet
20190620
20200215
20210618 IoP-KY-FeSe
FeSeTe thin film
Graphene Devices
20190723 Graphene Devices
20190821 Graphene device
20200316 Graphene BowTie
20200323 Graphene BowTie (Si)
20200608 Graphene BowTie (SiO2/Si)
NbN Film: IBD
IBD 1~20
IBD-002-20160106
IBD-004-20160130
IBD-005-20160201
IBD-006-20160202-1
IBD-007-20160202-2
IBD-008-20160203
IBD-019-20160225
IBD-020-20160314
IBD-003-20160113
IBD 21~40
IBD-021-20160316
IBD-022-20160321
IBD-023-20160323
IBD-024-20160329
IBD-025-20160420
IBD-026-20160421
IBD-027-20160426
IBD-028-20160427
IBD-029-20160428
IBD-030-20160429
IBD-031-20160511
IBD-032-20160512
IBD-033-20160516
IBD-034-20160517
IBD-035-2016051801
IBD-036-2016051802
IBD-037-20160523
IBD-038-20160524
IBD-039-20160601
IBD-040-20160602
IBD 41~60
IBD-041-20160603
IBD-042-20160604
IBD-044-20160706
IBD-045-20160713
IBD-046-20160714
IBD-047-20160719
IBD-048-20160720
IBD-049-20160726
IBD-050-20160727
IBD-051-20160728
IBD-052-20160728
IBD-053-20160802
IBD-054-2016080301
IBD-055-2016080302
IBD-056-2016080401
IBD-057-2016080402
IBD-058-20160810
IBD-059-2016081002
IBD-060-20160811
IBD 61~80
IBD-061-20160922
IBD-062-20161012
IBD-063-20161013
IBD-064-20161020
IBD-065-20161024
IBD-066-20161102
IBD-067-20161103
IBD-068-20161109
IBD-072-2016111601
IBD-073-206111602
IBD-074-20161117
IBD-076-20161124
IBD-077-20161216
IBD-078-20161219
IBD-079-20161227
IBD-080-20170112
IBD 81~100
IBD-081-20170124
IBD-082-20170125
IBD-083-20170216
IBD-084-20170222
IBD-085-20170223
IBD-086-20170310
IBD-087-20170418
IBD-088-20170425_AlN
IBD-089-20170428
IBD-090-20170503
IBD-091-20170504_65Å AlN
IBD-092-20170511
IBD-093-20170516
IBD-094-2017051801
IBD-095-2017051802
IBD-096-20170519
IBD-097-20170605
IBD-098-20170606
IBD-099-20170607
IBD-100-20170608
IBD 101~120
IBD-101-2017061201
IBD-102-2017061202
IBD-103-20170614
IBD-104-20170620
IBD-105-20170621
IBD-106-2017062201
IBD-107-2017062202
IBD-108-20170628
IBD-109-20170629
IBD-110-20170629
IBD-111-2017063001
IBD-112-2017063002
IBD-113-2017071201
IBD-114-2017071202
IBD-115-20170713
IBD-116-20170718-AlN
IBD-117-20170718
IBD-118-20170719
IBD-119-20170720
IBD-120-20170721
IBD 121~140
IBD-121-20170722
IBD-122-20170722
IBD-123-20170902
IBD-124-20170903
IBD-125-20170904
IBD-126-20170914-AlN
IBD-127-20170923
IBD-128-20170925
IBD-129-20170925
IBD-130-20170926
IBD-131-20171017-AlN
IBD-132-20171020
IBD-133-20171025
IBD-134-20171026
IBD-135-20171102
IBD-136-20171213
IBD-137-20171227
IBD-138-20171228
IBD-139-20171228
IBD-140-20171229
IBD 141~160
IBD-143-20180412
IBD-144-20180427
IBD-145-20180508-AlN
IBD-146-20180522-AlN
IBD-148-2018052301
IBD-149-2018052302
IBD-150-2018061401
IBD-151-2018061402
IBD-152-20180730
IBD-153-20180809
IBD-154-20180815-AlN 3nm
IBD-155-20180816
IBD-156-20180823
IBD-157-20180913
IBD-158-20181025-AlN
IBD-159-20181127
IBD-160-20181130
IBD 161~180
IBD-161-20181203
IBD-162-20181203
IBD-163-20190102-AlN 20 nm
IBD-164-20190226
IBD-165(T)-20190327
IBD-166(T)-20190418
IBD-167(T)-20190430
IBD-168-20190502-Al
IBD-169(T)-20190502
IBD-170(T)-20190516
IBD-171(T)-20190521
IBD-172(T)-20190521
IBD-173(T)-20190524
IBD-174(T)-20190528
IBD-175(T)-20190529
IBD-176(T)-20190604
IBD-177(T)-20190605
IBD-178(T)-20190606
IBD-179(T)-20190610
IBD-180(T)-20190611
IBD 181~200
IBD-181(T)-20190612
IBD-182(T)-20190613
IBD-189(T)-20190715
IBD-190(T)-20190923
IBD-191-20190924_TaN
IBD-192(T)-20190924
IBD-193(T)-20190926
IBD-194-20190926_TaN
IBD-196(T)-20191225
IBD 201~220
IBD-203-20200106-AlN_100%
IBD-204-20200107-AlN_10%
IBD-205-20200108-AlN_40%
IBD-206(T)-20200220
IBD-207(T)-20200224
IBD-208(T)-2020022501
IBD-209(T)-2020022502
IBD-210(T)-20200226
IBD-211(T)-20200715
IBD-212(T)-20200716
IBD-213-20200803-AlN 30 nm
IBD-214-20201222
IBD-215-20201223
IBD-216(T)-20210112
IBD-217-20210304
IBD-218(T)-20210307
IBD-219(T)-20210307
IBD-220(T)-20210318
IBD 221~228
IBD-221(T)-20210406
IBD-222(T)-20210406
IBD-223(T)-20210407
IBD-224(T)-20210407
IBD-228(T)-20210902
IBD 229~240 (2")
IBD-229(T)-20211105
IBD-230(T)-20211118
IBD-231(T)-20211220
IBD-232(T)-20220110
IBD-233(T)-20220125
IBD-234(T)-20220316
IBD-235(T)-20220321
IBD-236(T)-20220328
IBD-237(T)-20220330
IBD-238(T)-20220401
IBD-239(T)-20220420
IBD system
IBD I-V curve
Sample List
Turbo (Osaka)
備品及基板
3C-SiC Hall bar measurements
4H-SiC measurements
Guns of IBD
IBD-230
Jack's sample-20150312
pump maintenance
基板
石英玻璃視窗 of M.C.
腔體設計
Al target gun 1
Nb target_gun2
20151217
20160201
20180223
IBD 1~20
NbN Multi-direction Test
20171219 NbN Multi-direction Test
20171221 NbN Multi-direction Test
20180417 NbN Multi-direction Test
20180515 Multi-direction Test
NbN Reference
Raman
Summary of the NbN films
HEB Mixers
Antenna Design
1.4 THz
1.5 THz
Fabrication
20150721
20150728
20150810
20150827
20150917
20151116
20151222
20151229
20160121
20160215
20160418
20160426
20160523
20160629
20160707
20160905 Graphene HEB
20161116 ( 2.2 nm NbN )
20170216
20170307
20170313-HEB-1st key (IBD-86-1,3)
20170322 (IBD86-1)
20170425 (IBD-87-1)
20170609 (IBD-100-3)
2018 Spiral HEB
HEB TEST
HEB EBL Calibration
Contact Pad
E-Gun New Holder Test
Inner Antenna
HEB-Ni-Test
HEB-Ni-3nm-20181008
HEB-Ni-IBD100-30A
HEB-Ni-IBD113-47A
HEB-Ni-IBD119-40A
ICPRIE etching test
NbN Film: M2
M2
Condition comparison
Guns of M2
M2 I-V Curve
Sample List
20150401
20150601
20150626
20150629
20150630
20150701
20150708
20150714
20150825
20150921
20150923
20151005
20151007
20151013
20151014
20151021
20151028
20151029
20151104
20151111
20151112-1
20151112-2
20151113
20151118
20151130
20151201
20151207
20160115
20160201
20160204
20160204
20160223
20160223
20160223-2
2016022402
2016022403
2016022404
2016022405
20160225
2016030401
2016030403
2016031401
2016031402
2016031403
2016031404
2016031601
2016031602
2016031603
2016031604
2016032101
2016032102
2016032103
2016032104
20160325
2016032801
2016032802
2016032803
2016032901
2016032902
2016032903
2016042001
2016042002
20160520
2016052002
20160523
20160526
7.4 mtorr
7.7 mtorr
8.5 mtorr
NbN_CA3
20151217(-run No.293)
20151222 (Volt.-time curve)
Ar/N2: 12/3.3 7.7 mtorr
Ar/N2: 12/3.3 8.5 mtorr
Ar/N2: 12/3.5 8.5 mtorr
Ar/N2: 12/4.0 8.5 mtorr
M2-277-20151118-1
M2-278-20151118-2
OM
OM
OM
OM
OM
OM
OM
OM
OM
OM (HR-Si)
OM (HR-Si)
OM (HR-Si)
OM (Si)
OM (Si)
OM (SiO2)
OM photo
OM photos
SEM
SEM
SEM
SEM
SEM
Tc
Proximity effect at contact pad
20170831 Proximity Effect Test
20171005 Proximity Effect Test
Silicon Lens
Hemispheroid
Semiellipsoid
1.4 pattern
1.5 pattern
Defocus
Focus
LO data sheet
Measurement
AFM
3C-SiC
3C-SiC on HRSi
4H-SiC epilayer (n-type) on 4H-SiC
4H-SiC substrate
IBD-63-1.5 nm NbN
IBD-66- 5.7 nm NbN
IBD-67- 4.7 nm NbN
IBD-68-2.2 nm NbN
IBD-72-2.6 nm NbN
IBD-73-1.9 nm NbN
IBD-74-1.3 nm NbN
IBD-78-2.7 nm NbN
IBD-79-5 nm NbN
roughness of Nb
25 nm AlN/Si substrate
EDS by TEM
IBD-112
IBD-127
IBD-178 (T)_NCKU
EELS
IBD-101
IBD-109
IBD-127
20171220_中研院物理所
20180108_NCKU
SAO240-1-5-TC 110~220 C
20180108_NCKU
20180212 NCKU
SAO240-1-5-TF no anneal
Hall measurement by PPMS
IBD-54
HRTEM
IBD-041
IBD-41-40"-NbN/MgO
IBD-41-40"-NbN/SiC
IBD-068
IBD-079
IBD-79-2
IBD-79-3
IBD-101_3 nm NbN/3CSiC
IBD-106_3.7nm NbN/3CSiC
IBD-107_4nm NbN/3CSiC
IBD-109_2.5 nm NbN/3CSiC
IBD-110_1.9nm NbN/3CSiC
IBD-112_4.6 nm NbN/3CSiC
IBD-113_4.8 nm NbN/3CSiC
IBD-114_5nm NbN/3CSiC
IBD-124_4nm NbN/4HSiC
IBD-127_20nm NbN/4HSiC(30/3.3)
IBD-150_20nm NbN/4HSiC (30/2.9)
IBD-151_20nm NbN/4HSiC(30/3.7)
IBD-153_10 nm NbN on 4H-SiC
IBD-178 (T)
IBD-206(T)-4_2nm NbN/4H-SiC
IBD-206(T)-7_2nm NbN/3C-SiC
IBD-210(T)-4_6nm NbN/4H-SiC
IBD-210(T)-7_6nm NbN/3C-SiC
SAO240-1-5-TC 110~220 C
SAO240-1-5-TF no anneal
OM
Raman spectrum
(001) 3C-SiC/Si
(001) 4H-SiC
IBD-153
IBD-162
IBD-171(T)
IBD-171(T)_5nm delta-NbN/3CSiC/Si
IBD-171(T)_5nm eps-NbN/4H-SiC
IBD-173 (T)
IBD-176 (T)
IBD-177 (T)
IBD-178 (T)
IBD-179 (T)
IBD-180 (T)
IBD-181 (T)
IBD-182 (T)
IBD-189 (T)
IBD-189 (T)_10 nm epsi-NbN/4HSiC
IBD-189(T)_10 nm de-NbN/3CSiC/Si
Powder_delta NbN
Powder_epsilon NbN
SEM
20200819 SiO2 Thickness SEM
20200826 SiO2 2000 A-SEM
IBD
3C-SiC/ HRSi
3C-SiC/Si
4H-SiC
M2
Spectrum
database
SQUID
IBD-127
Two-channel R-T system
XRD
jcpds card
sample list
IBD
programs of PW3071
fused quartz
HRSi
IBD-127
IBD-20
IBD-21
IBD-22
IBD-23
IBD-24
IBD-25
IBD-26
IBD-27
IBD-28
IBD-29
IBD-30
IBD-31
IBD-32
IBD-33
IBD-34
IBD-35
IBD-36
IBD-37
IBD-38
IBD-50
IBD-51
IBD-53
IBD-54
IBD-55
IBD-56
IBD-57
IBD-58
IBD-59
IBD-60
Jack_N2=1.2_20141007
Jack_N2=1.5_20141006
Jack_N2=1.8_20140926
Jack_N2=2.1_20140930
Jack_N2=2.4_20141003
Jack_N2=2.7_20141002
Jack_N2=3_20141008
MgO
MgO_new_20160519
program 4
program 5
SiC_no BOE etching
SiO2
Meta-material
20160805
20160808
20160811
20160818
20160819
20160905
20160906
20160930
20161202 Meta G = 3.0
20161219
20161220
Reference
RLC circuit phase shift calculations
Simple Example
Simulations by HFSS
NbN Ion gating device
20190716 NbN Ion gating
20190801 NbN Ion gating
NbN Noise Thermometer
20200717 NbN NT-1UC/2UC (3C, HEB Type)
NTHU Al (Thermal Coater)
On-Chip Spectrometer
References
Simulation
CPW
Devices
Filter
Inverted transmission line
KID
RF Choke
Simulation result
SiO2 side ground combine
Slot antenna
papers
2017
Epitaxial growth of few monolayers superconducting NbN films on a 3C-SiC/Si substrate with high critical temperature
Project weekly report
ALMA-report
ALMA weekly report - 2016
ALMA weekly report - 2017
ALMA weekly report - 2018
ALMA-annual report
SMA-report
SMA weekly report - 2016
SMA weekly report 2017
Proposals
summer student program
2016
SAFARI calibration source
FTS Adjustment
Integrating sphere
20190510 QMC Measurement
20190718-Comparison of different IS
20201229 New 80 mm IS etching
20210128 Al Plate BOE
20210309 new 80mm IS-1 BOE
5083H112-Sphere
8 cm IS
Al plate - OM check
AL6063-Sphere
IS Uniformity test
20200109-IS 50mm-SB+etch-Uniformity test
20200116 50mm-SB+etch-Uniformity test
20200218 IS 80mm-SB+etch-uniformity test
IS-holes & grid
PR on Al plate Test
PR on new 5083 etching
references
References
SB+Etching on new 5083
Meetings and Report
20170208 meeting with SRON
20180530 - SPICA Consortium Meeting
20191027-consortium meeting
microlamp-simulation
ML testing
CS-ML-1-2-1 B4-4
CS-ML-1-2-1 C4-1
CS-ML-1-2-1 C6-1
CS-ML-1-2-2 C9-4
CS-ML-1-2-2-C9-2
CS-ML-1-7-1 C5-2
CS-ML-1-7-1 C5-2 raw data
CS-ML-H-1-1
Micro-Lamp EBL Test Mask
process testing for CS
CS-ML-1-10
CS-ML-1-2
CS-ML-1-4
CS-ML-1-4 DC Measurement
CS-ML-1-5
CS-ML-1-6
CS-ML-1-7
CS-ML-1-8
CS-ML-1-9
CS-ML-Emissivity-test
Progress report
references
SEM Observations
CaS
20210720
FeSe
SEM operation record
Probe Current
Single Photon Detector
20200331 SPD Test
20210120 SPD Test
20210126 SPD Test
20210223 SPD Test
20210308 SPD Test
20210413 SPD Test
20210517 SPD Test (IoP)
SPD EBL Mask
SPD-1 (20210308 SPD)
SPD-2-IoP (20210517 SPD-IoP)
SPD-3 (20210730 SPD)
SPD-4 (IBD-228-4)
SIS Mixers
20151002 SIS data summery
Al-40-40 mag test
Anneal test
Re-calculate data
APSOS
APSOS-B1
APSOS-B2
APSOS-B2-2-20180925
APSOS-B2-MOD1-1
APSOS-B2-MOD1-2
HARP-01
HARP-01-1
A2_1_Dipstick
A2_1_RRT
RF Test
Raw Data
HARP-01-2
HARP-01-3
IDP
JTWPA
JTWPA-1-1
JTWPA-1-2
JTWPA-1-3
JTWPA-1-4
JTWPA-1-5
JTWPA-1-6
JTWPA-1-7
JTWPA-1-8
JTWPA-1-9
JTWPA-1-10
JTWPA-1-11
JTWPA-1-12
KVN-NTHU-1
KVN-NTHU-1-6
KVN-NTHU-1-7
KVN-NTHU-1-8
KVN-NTHU-1-9
PMO
PMO-100G-20210202
PMO-BAND-2-2
PMO-Nb100G-20200505
PMO-Nb100GHZ-20190628
PMO-SIS-230-345-660-1-1
QC-MIXER
QC-MIXER-1-1
QC-MIXER-1-2
QC-MIXER-1-3
QC-MIXER-1-4
SAO200-4
SAO200-4-10
SAO240-1
SAO240-1-2
SAO240-1-4
SAO240-1-5
SAO240-1-6
SAO240-1-7
SAO240-1-8
SAO240-1-9
SAO300-2
SAO300-2-6
SAO320 Resistance Patterns
20170825 SAO320 EBL Test
20170829 SAO320 EBL Test
SAO400-1A
SAO400-1A-10
SAO400-1A-12
SAO400-1A-8
SAO400-1A-9
SMANTHU-1
SMANTHU-1-11
SMANTHU-1-12
SMANTHU-1-13
SMANTHU-1-14
SMANTHU-1-16
SMANTHU-1-18
SMANTHU-1-19
SMANTHU-1-20
SMANTHU-1-21
SMANTHU-1-22
SMANTHU-1-23
SMANTHU-1-24
SMANTHU-1-25
SMANTHU-1-26
SMANTHU-1-27
SMANTHU-1-28
SMANTHU-1-29
SMANTHU-1-30
SMANTHU-1-31
SMANTHU-1-32
SMANTHU-1-33
wSMA
wSMA-240-1-1
wSMA-240-1-10
wSMA-240-1-9
wSMA-240-2-1
wSMA-240-2-11
wSMA-240-2-12
wSMA-240-2-2
wSMA-240-2-3
wSMA-240-2-4
wSMA-240-2-5
wSMA-240-2-6
wSMA-240-2-7
wSMA-240-2-8
wSMA-240-2-9
wSMA240-1-2
wSMA240-1-3
wSMA240-1-4
wSMA240-1-5
wSMA240-1-7
wSMA240-1-8
wSMA-HB
wSMA-HB-1-1
wSMA-HB-1-2
wSMA-HB-1-3
wSMA-HB-1-4
wSMA-HB-1-5
wSMA-HB-1-6
wSMA-HB-1-7
wSMA-HB-1-8
wSMA-HB-1-9
wSMA-HB-1-10
wSMA-HB-1-11
wSMA-HB-1-12
wSMA-HB-1-13
wSMA-HB-1-14
wSMA-HB-1-15
wSMA-HB-1-16
T-M3-RF clean test for wiring-20220509
T-M3-RF clean test for wiring-20220510
T-M3-RF clean test for wiring-20220510
wSMA-HB-1-17
wSMA-HB-1-18
wSMA-HB-1-19
wSMA-200-1-3
wSMA-200-1-4
wSMA-200-1-5
wSMA200-1-1
wSMA200-1-2
wSMA-240-2
wSMA-240-2-13
wSMA-240-2-14
wSMA-240-2-15
wSMA-240-2-16
wSMA-240-2-17
wSMA-240-2-18
JJ-CL-1
JJ-CL-1-1
JJ-CL-1-2
JJ-CL-1-3
JJ-CL-1-4
JJ-CL-1-6
KVN230-1
KVN230-1-1
KVN230-1-2
SSQ-STM
SSQ-STM-1-23
SSQ-STM-1-24
superconduting 3td-device
3td-16
3td-17
3td-24
topological device
20150522
Calibration
TWPA
KITWPA
KITWPA-1 (IBD-231)
KITWPA-2 (IBD-231)
KITWPA-3-NbTiN (T-M2-NbTiN-13)
KITWPA-4-NbTiN (T-M2-NbTiN-28)
User Manual
Waveguide Roughness
Al Waveguide Test
Nb-Coated Waveguide
Weak Link
Weak Link EBL Test
20171109 Weak link Test
20171121 Weak link Test
20171205 Weak Link Test
20180119-Weak Link Test
Weekly report
Angel Lou Dagala
APing
CHLin
CLwang
20210628-CuO-Si-400/900 Pulse
ASIP-20210511 SiN ICPRIE
Faith Marie (upload by Helen)
H. W. Chang (Helen)
2016-2019
2020-2021
2022-2023
Hsun Hsieh
Thesis
2018.06.28 Oral Defense
Figures and Tables
Origin Files
Reference
Proximity Effect
Quantum Size Effect
Scaling Law
Jimmy
2015
2016
2017
2019
2020
KY
Shih-Kai Ho
Shou-Hsien
20161011_lunch talk
ADS_project
PL1515
PP1015
Conference paper and PPT
2014 EARX 15th PPT
2015 EARX 16th PPT
2016 AP-RASC PPT
2016 RFIT PPT
cryogenic system calibration
IF amplifier
WIN_015_LNPHEMT
WIN_025_PHEMT
WIN_PP1015
Q-band LNA
WIN_015_LNPHEMT
WIN_PP1015
housing
LNA_device2F100um
LNA_device2F75um
Q-band mixer
OMMIC_70MHEMT_mixer
WIN_mixer
WIN_015_LNPHEMT
2-stage mixer
3-stage mixer
housing
housing
Ting-Hang Pei
Trang
Yenyu
YP
Sample list and test result
system calibration and ability
AZ4620 test
KOH-wet etch test
spin coater
UHV Magnetron Sputtering Deposition System
20160224-FH7500rpm-test
OMT record
T-AZ4620-20180830-1
T-AZ4620-20180830-2
T-AZ4620-20180903-1
T-AZ4620-20180904-1
T-AZ4620-20180906-1
T-CS-ML-KOH-20200812
T-Deep RIE-20180925
T-Deep RIE-20181025
T-Nb net-20181129
T-Nb-net-20181227-no glue
YRH
1.5 THz Receiver Cartridge
CLNAs
LO Module
Measurement System
Power Distributor
Beam Alignment
CITLF4
LNF CLNA
Testing of HEB-20170322-B
Testing of HEB-20170322-D
Testing of HEB-20170425-B
Testing of HEB-20170425-D
Testing of HEB-20170609-D
Testing of HEB-Ni-20180622-3C
Testing of HEB-Ni-20180622-4B
Testing of HEB-Ni-20181008-60
TX-206
2016 THz meeting
2017 THz meeting
2018 THz meeting
Integrating sphere for SAFARI calibration source
FTIR
OM Images
Cold Detector
SS0710-AlO1214-Flat
SS0710-AlO1214-IS
YJ
wSMA project
wSMA-PT-DP
OMT
OMT-1
OMT-2
layout and mask
OMT test fixture
OMT-I-SiO2-20161014
OMT-KOH-etch test-20160922
OMT_simulation
T-ICP-20170223
T-KOH-20161003
T-OMT-20161024
T-OMT-20161123
T-OMT-Au-20161123-6
OM (Before Lapping)
T-OMT-20161130
T-OMT-Au-20161228
T-OMT-Au-20170419
T-OMT-I-SiO2-20161017
T-OMT-ICP test-20170425
wSMA-OMT-2-1
wSMA-OMT-2-2
wSMA-OMT-2-3
wSMA-OMT-2-4
Si attenuator
references
Si attenuator -1
Si attenuator -1 mask layout
Si attenuator -1-1
WSMA-SA-1-2-3-HB-test
wSMA-SA-1-process data sheet
Si directional coupler
simulation
test
T-wSMA-17DB-20190819
T-wSMA-17DB-20190830
wSMA-17DB-1
wSMA-17DB-2
wSMA-17dB-2-2
wSMA-17DB-2-3
wSMA-17dB-2-2-1
wSMA-17dB-2-2-1-photos
wSMA-DC2
wSMA-DC3
wSMA-DC-3-3
wSMA-DC3-1
wSMA-DC3-2
photos
photos
wSMA-DC3-1-1-HB
wSMA-DC3-2-1-LB
wSMA-DC4
wSMA-DC5
wSMA- cryogenic IR Filter
SMA-IRF-17-3-20180507
SMA-IRF-17-3-20180509
SMA-IRF-1mm-quartz-thickness test
T-IRF-20170505
T-SMA-IRF-20170327
T-SMA-IRF-20170918-1&2
T-SMA-TRF-20170710-4Inch test
wSMA-diplexer
YBCO
YBCO etching(Ion miller)
YBCO etching(Ion miller)-OM
YBCO SEM Pattern
EBL pattern - OM
SEM Dose Test
差勤卡
2015
APing
CLWang
Jimmy
KY
Yenyu
研磨機保養與使用
LO-Dist ver1 Process Data Sheet
Run7
Run8
O-ring test in KOH wet etching
Lab
Achievements
Clean Room Facilities
Clean Room Photos
SIS Mixer Performance Evaluation
Software
Sub-mm/THz Fourier Transform Spectrometer
Member
Ming-Jye Wang
papers
Poster
2016 APRASC - Korea
2017 PSROC annual meeting
Presentation
Tech Lunch Talk
wSMA PCB Measurement
檢點表
wSMA-HB-1-8
Process Data sheet-wSMA-HB-1-8.doc
Report abuse
Page details
Page updated
Report abuse
Process Data sheet-wSMA-HB-1-8.doc