Sample number: "IBD-121-AlN on NbN/3C-SiC (diffusion oil)-RT-0/33.3 sccm-2.1 mTorr-rotate (10 r.p.m.)-166 mA-729 sec.-20170722"
Background of the M.C. (Main chamber): 4.4*1e-8 torr
Substrate: 20170718 IBD-117-4nm NbN/20170719 IBD-118-4nm NbN/20170720 IBD-119-4nm NbN/20170721 IBD-120-4nm NbN/SC-SiC
Mounting: diffusion oil
Temp. of Sub. (set /after growth): RT, 19/20 degree C
Ar/N2: 0 sccm/33.3 sccm
APC: set value of the APC position is 0 (the pressure shows 1.9-2.4 mTorr)
DC current/ volt./ Watt.: 166 mA/ 558-559 V/ 93 W
Pre- deposit time: 500 sec.
Deposit time: 729 sec.; Thickness: 20 nm
(The thickness determined by IBD93: 87.2 nm/ 3180 sec.; Deposition rate: 0.27 Å/sec.)