Sample number: "M3-007-Al-testchip (oil)-10 C- Ar 30 sccm-12 mTorr-0.38 A-500 sec.-20210728"
Background of the M.C. (Main chamber): 1.87*1e-8 torr
Substrate: testchip
Mounting: vacuum oil
Temp. of Sub. (set /after growth): 10/ ? degree C
Ar/O2/N2: 30 sccm/0/0
Working pressure: 12 mTorr (APC=4.9 %)
DC current/ volt./ Watt.: 0.38 A/ 321-329 V/ 125 W
Pre- deposit time: 5 mins.
Deposit time: 500 sec.; Thickness: 612 A (alpha-stepper) ; Deposition Rate: 1.22 A/sec.