Sample number: "IBD-5-NbN-double polished MgO(Ag)-900 C-30/1.2sccm-11.4mTorr-236mA-20160201"
Background of the M.C. (Main chamber): 2.8*1e-8 torr
Substrate: double polished MgO
Mounting: Sliver glue
Temp. of Sub.: 900 degree C
Ar/N2: 30sccm/1.2sccm
APC: set value of the APC position is 90 (the pressure shows 11.4-12.2 mTorr)
DC current: 236 mA
Pre- deposit time: 300 sec.
Deposit time: 500 sec; Thickness: 570 A; Deposit Rate: 1.139 A/sec.
The critical Temp (Tc): 12.74K