Wafer : Si wafer
with diffusion pump oil
base pressure: 5.0*E-8 torr
Ar/N2: 12/3.5 8.5 mtorr
pre-sputtering time: 300s
curve measuring time: 845s
current: 0.5~2.5 A, step: 0.1 A, waiting time: 30s/step