Sample number: "M3-004-Al-testchip (oil)-10 C- Ar 30 sccm-12 mTorr-1 A-500 sec.-20210723"
Background of the M.C. (Main chamber): 3*1e-8 torr
Substrate: testchips
Mounting: vacuum oil
Temp. of Sub. (set /after growth): 10/ ? degree C
Ar/O2/N2: 30 sccm/0/0
Working pressure: 12 mTorr
DC current/ volt./ Watt.: 1 A/ 345 V/ 339 W
Pre- deposit time: 5 mins.
Deposit time: 500 sec.; Thickness: 2358 A (alpha-stepper); Deposition Rate: 4.716 A/sec.