Sample number: "M3-002-Nb-testchip (oil)-10 C- Ar 30 sccm-8 mTorr-3.5 A-100 sec.-20210701"
Background of the M.C. (Main chamber): 2.5*1e-8 torr
Substrate: testchips
Mounting: vacuum oil
Temp. of Sub. (set /after growth): 10/ ? degree C
Ar/O2/N2: 30 sccm/0/0
Working pressure: 8 mTorr
DC current/ volt./ Watt.: 3.5 A/ 357 V/ 1243 W
Pre- deposit time: 5 mins.
Deposit time: 100 sec.; Thickness: 2017 A (alpha-stepper); Deposition Rate: 20.17 A/sec.