Sample number: "M3-003-Nb-testchip (oil)-10 C- Ar 30 sccm-8 mTorr-3.5 A-100 sec.-20210702"
Background of the M.C. (Main chamber): 1.67*1e-8 torr
Substrate: testchips
Mounting: vacuum oil
Temp. of Sub. (set /after growth): 10/ ? degree C
Ar/O2/N2: 30 sccm/0/0
Working pressure: 8 mTorr
DC current/ volt./ Watt.: 3.8 A/ 360 V/ 1360 W
Pre- deposit time: 5 mins.
Deposit time: 100 sec.; Thickness: 2225 A (alpha-stepper); Deposition Rate: 22.25 A/sec.