Sample number: "IBD-145-AlN on NbN/3C-SiC (diffusion oil)-RT-0/33.3 sccm-2.1 mTorr-rotate (10 r.p.m.)-167 mA-1458 sec.-20180508"
Background of the M.C. (Main chamber): 3.2*1e-8 torr
Substrate: multidirection of IBD-137-15nm NbN on 4H-SiC
Mounting: diffusion oil
Temp. of Sub. (set /after growth): RT, 17/18/19/20 degree C
Ar/N2: 0 sccm/33.3 sccm
APC: set value of the APC position is 130 (the pressure shows 1.9-2.4 mTorr)
DC current/ volt./ Watt.: 167 mA/ 554 V/ 93 W
Pre- deposit time: 500 sec.
Deposit time: 1458 sec.; Thickness: 40 nm
(The thickness determined by IBD93: 87.2 nm/ 3180 sec.; Deposition rate: 0.27 Å/sec.)