Sample number: "IBD-204-AlN on quartz-RT-30/3.3 sccm-2.9 mTorr-rotate (10 r.p.m.)-243 mA-3000 sec.-20200107"
Background of the M.C. (Main chamber): 2.8*1e-8 torr
Substrate:quartz
Mounting: diffusion oil
Temp. of Sub. (set /after growth): RT, 17-22 C
Ar/N2: 30 sccm/ 3.3 sccm
APC: set value of the APC position is 235 (the pressure shows 2.6-3.4 mTorr)
DC current/ volt./ Watt.: 243 mA/ 463 V/ 113-112 W
Pre- deposit time: 400 sec.
Deposit time: 3000 sec.; Thickness: ~181.3 nm (0.06 nm/s)