Sample number: "IBD-213-AlN on IBD-211 and 212- 2 u.c.-/1 u.c.-NbN/3C-SiC (diffusion oil)-RT-0/33.3 sccm-2.6 mTorr-rotate (10 r.p.m.)-179 mA-1095 sec.-20200803"
Background of the M.C. (Main chamber): 3.2*1e-8 torr
Substrate: multidirection of IBD-119-4nm NbN on 3C-SiC
Mounting: diffusion oil
Temp. of Sub. (set /after growth): RT, 17/18/19 degree C
Ar/N2: 0 sccm/33.3 sccm
APC: set value of the APC position is 130 (the pressure shows 2.4-2.9 mTorr)
DC current/ volt./ Watt.: 179 mA/ 518 V/ 93 W
Pre- deposit time: 500 sec.
Deposit time: 1095 sec.; Thickness: 30 nm
Purpose: for thermometer fabrication
(The thickness determined by IBD93: 87.2 nm/ 3180 sec.; Deposition rate: 0.27 Å/sec.)