Facilities

For Fabrication:

Electron Beam Evaporator (電子束蒸鍍機)

Ion Beam Deposition System (氧化物濺鍍系統)

Multi-chamber Sputtering System (多腔體濺鍍系統)

Metal Films Deposition System (薄膜濺鍍機)

DUV Mask Aligner for Both Sides Alignment (雙面對準深紫外曝光機)

Mask Aligner (光罩對準機主體及其他配件)

Inductively Coupled Plasma Reactive Ion Etcher (電感耦合電漿離子反應式蝕刻機)

Ion Etcher System (離子蝕刻系統)

Reactive Ion Etching System (反應式離子蝕刻系統)

Automatic Dicing Saw (晶片切割儀器)

Lapping and Polishing Machine for THz Beam Splitters (兆赫波分光器鏡面磨製機)

For Testing:

Cartridge Test Cryostat (低溫恆溫器)

1.5 THz Transmitter (兆赫波光源組)

Sub-Millimeter-wave Fourier Transformation Spectrometer (次毫米波傅立葉轉換光譜儀)

Composite Germanium Bolometer Detector System (複合鍺輻射熱測定器偵測系統)

Thermal Field Emission Scanning Electron Microscope (高解析熱電子型場發射掃描式電子顯微鏡)

Alpha Step Profiler (表面應力及型狀測試儀)

Alpha Step Profiler (薄膜測厚儀)

High speed x-ray detector (X光低溫繞射儀之高速偵測器)

3D Laser confocal microscope and profile analysis software (3D雷射共軛焦顯微鏡及輪廓分析軟體)

** 僅開放天文所通過認證之人員使用 ( Only open for the certified users at ASIAA )