Sample number: "IBD-203-AlN on quartz-RT-0/33.3 sccm-2.6 mTorr-rotate (10 r.p.m.)-210 mA-3000 sec.-20200106"
Background of the M.C. (Main chamber): 3.6*1e-8 torr
Substrate:quartz
Mounting: diffusion oil
Temp. of Sub. (set /after growth): RT, 17-22 C
Ar/N2: 0 sccm/33.3 sccm
APC: set value of the APC position is 125 (the pressure shows 2.4-3.1 mTorr)
DC current/ volt./ Watt.: 210 mA/ 536 V/ 112 W
Pre- deposit time: 400 sec.
Deposit time: 3000 sec.; Thickness: ~95.1 nm (0.032 nm/s)