Thermal Field Emission Scanning Electron Microscope (高解析熱電子型場發射掃描式電子顯微鏡)

Integrated with Energy Dispersive Spectrometer (能量散佈分析儀) and Elphy Quantum E-beam Lighography System (電子束微影技術控制系統).

** Only open for the certified users at ASIAA.