Sample number: "M3-001-Nb-testchip (oil)-10 C- Ar 30 sccm-10 mTorr-3.5 A-150 sec.-20210629"
Background of the M.C. (Main chamber): 1.81*1e-8 torr
Substrate: testchips
Mounting: vacuum oil
Temp. of Sub. (set /after growth): 10/ ? degree C
Ar/O2/N2: 30 sccm/0/0
Working pressure: 10 mTorr
DC current/ volt./ Watt.: 3.5 A/ 339 V/ 1190 W
Pre- deposit time: 10 mins.
Deposit time: 150 sec.; Thickness: 2300 A (alpha-stepper); Deposition Rate: 15.3 A/sec.
Note: Film peeling.