Acest capitol a trecut în revistă istoria dezvoltării tehnicilor de lustruire care au fost tehnologia de ultimă oră pentru a satisface cerințele în orice moment și s-a concentrat pe tehnologia CMP, care este indispensabilă procesării dispozitivelor semiconductoare în prezent. De asemenea, au fost abordate fundalul tehnologiei CMP în procesarea semiconductoarelor și tendința tehnologică recentă. De asemenea, a fost introdus și viitorul proces de lustruire, care va contribui la lume prin producția de dispozitive opto-mecatronice inovatoare.

De altfel, o parte a acestei lucrări a fost susținută de JSPS KAKENHI Grant (Ajutor Grantin pentru Cercetare Științifică (S)) Numărul 24226005.

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