Rezumat

Tehnologiile de nanofabricare cu fascicule de ioni au fost utilizate pe scară largă în micro/nanofabricare, cu avantaje unice de rezoluție ridicată de fabricație și precizie ridicată a formei, flexibilitate ridicată, precum și procesare fără mască. Tehnologiile IBM au un impact semnificativ în multe domenii cheie de cercetare, cum ar fi nanotehnologia, micro-/nanooptica, ingineria suprafețelor și biotehnologia. Odată cu dezvoltarea ulterioară a sistemului IBM de înaltă performanță, metodele IBM ar fi un candidat vital pentru a deveni abordarea principală în micro-/nanotehnologie.

Ion-beam nanofabrication technologies have been widely used in micro-/nanomanufacturing, with unique advantages of high fabrication resolution and high form accuracy, high flexibility, as well as maskless processing. IBM technologies have a significant impact in many key research areas, such as nanotechnology, micro-/nanooptics, surface engineering, and biotechnology. With further developments in the high-performance IBM system, IBM methods would be a vital candidate to become the mainstream approach in the micro-/nanotechnology.

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