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The flexible force sensor have attracted a tremendous amount of attention in the feedback control and the human-machine interface. The sensor will measure the magnitude of the force for the computer or human body .It is most commonly used in fingertip force measurement, which requires high sensitivity and a wide measurement force range to meet the needs of electronic skin, wearable devices, and bionic robots.
Several methods, such as microstructures, had been proposed to increase the sensitivity of the force sensor. But it limits the range of the measurement. Researcher use a porous structure with a variety of pore diameters to make it highly sensitive in low pressure and expand the range of the measurement in high pressure. However, due to the limitation of its manufacturing method, it is hard to repeat manufacture the porous force sensors with the same performance.
The thesis proposed method to regular the porous structure with two kind of pore size(large pore diameter: 900 um, small pore diameter: 600 um), using mold method to manufacture. Reduce low reproducibility caused by pore arrangement. Through the comparison of the three structures in this article, we choose to use the porous structure with two kind of pore size. The large holes can increase the sensitivity of the sensor in low pressure to (-1.15, -0.279) (Ω/kPa), while the small holes keep sensitivity in high pressure to (-0.05,-0.006) (Ω/kPa),expand the measurement range. It has greater sensitivity than single size small holes (-0.9,-0.214) (Ω/kPa) in low pressure. And it has greater sensitivity than single size large holes (-0.02,-0.005) (Ω/kPa) and single size small holes (-0.03, -0.005) (Ω/kPa) in high pressure, enabling the measurement range to reach 2 kPa-38kPa in this thesis.