Investigation of Micro Resistive Welding for Assembly of Micro Structures
In this thesis, we propose to use micro resistance welding to assemble micro-structure. On structure design, we use bent-beam electro-thermal actuators to export the welding pressure. When we input the current, contact resistance will cause some high temperature in local and make the material melt on the contact surface to result in joint. Form the measure result, we can find the contact resistance is from about 20Ω to 3~4Ω, and the range that can successful weld is from 4.6Ω to 12Ω. Smaller contact resistance will consume more input power while welding, but the joint result and intensity are relatively good.
In MEMS field, although much work has been devoted to develop the micro-structures, few researches have been done on three-dimensional micro-actuators or micro-sensors. The key point is no appropriate assembly method. The result in this thesis proves resistance welding is feasible on assembly micro-structure, and it can overcome the problem of transmission question of the signal and energy. In the future, it may have a well chance to apply to realize assembly three-dimensional component by micro resistance welding.
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[2] C.-W. Chang and W. Hsu (June 2006). A Bio-compatible Microgripper Operated in Aqueous Environment, The 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore.
[3] C.-C. Yeh, J. Chung, C.-W. Chang and W. Hsu (January 2007). Micro Assembly by Micro Resistance Welding with Electro-Thermal Actuators, The 2nd Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Bangkok, Thailand.