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許鎮鵬 (Jenn-Perng Sheu)
許鎮鵬 (Jenn-Perng Sheu)
Investigation of A Thermally Actuated Valveless Miropump
Investigation of A Thermally Actuated Valveless Miropump
熱致動式無閥門微泵之研究
熱致動式無閥門微泵之研究
A micro membrane vibrator consisting of four bimorph cantilever beams and a central bimorph membrane is designed and fabricated here. In order to enlarge the volume stroke of the micropump, the membrane vibrator with two-way deflection ability is proposed. Due to the discrepancy of thermal expansion coefficients between different layers, the membrane moves with temperature change. The threelayer structure including SiO2-Ni-polyimide is fabricated with four masks. Additionally, backside etching is performed to fabricate the membrane structures. The numerical finite element program ANSYS 5.3 is used to simulate the behavior of the membrane vibrator. The maximum Z-axis displacement of the 1000 m x 1000 m micro membrane vibrator is 60 min upward direction and 40um in downward direction at temperature 200°C in simulation.
A micro membrane vibrator consisting of four bimorph cantilever beams and a central bimorph membrane is designed and fabricated here. In order to enlarge the volume stroke of the micropump, the membrane vibrator with two-way deflection ability is proposed. Due to the discrepancy of thermal expansion coefficients between different layers, the membrane moves with temperature change. The threelayer structure including SiO2-Ni-polyimide is fabricated with four masks. Additionally, backside etching is performed to fabricate the membrane structures. The numerical finite element program ANSYS 5.3 is used to simulate the behavior of the membrane vibrator. The maximum Z-axis displacement of the 1000 m x 1000 m micro membrane vibrator is 60 min upward direction and 40um in downward direction at temperature 200°C in simulation.
The con ventional chamber structure of a micropump consists of two passive check valves connected to an oscillating diaphragm which creates a chamber volume change.
The con ventional chamber structure of a micropump consists of two passive check valves connected to an oscillating diaphragm which creates a chamber volume change.
Because the movable check valves may cause many problems such as a high pressure drop across the valves, wear, fatigue of the movable parts, and more complicated fabrication processes, thus the valveless chanber structures are preferred Referring to the previous research, we design two new parts including rounded inlet and reentrant outlet. By means of this special on shapes of the flow channels, a larger net volume flow can be predicted to reach in a pumping cycle.
Because the movable check valves may cause many problems such as a high pressure drop across the valves, wear, fatigue of the movable parts, and more complicated fabrication processes, thus the valveless chanber structures are preferred Referring to the previous research, we design two new parts including rounded inlet and reentrant outlet. By means of this special on shapes of the flow channels, a larger net volume flow can be predicted to reach in a pumping cycle.
Here,we interest in fabricating thick chamber structures (i. e. 100 m thick ) which are possible to induce larger volume stroke. Therefore, the LIGA technique is utilized to fabricate thick chamber structures. We choose single crystal silicon and silicon-rich nitride as the carrier material of the deep X-ray masks which is the key technique of LIGA. By electroplating Au from several micro meter to about 20 micro meter, the low cost deep X-ray masks are fabricated. In addition, the deep etching of the Pyrex 7740 is studied which is suitable for fabricating the thick pump chamber structures.
Here,we interest in fabricating thick chamber structures (i. e. 100 m thick ) which are possible to induce larger volume stroke. Therefore, the LIGA technique is utilized to fabricate thick chamber structures. We choose single crystal silicon and silicon-rich nitride as the carrier material of the deep X-ray masks which is the key technique of LIGA. By electroplating Au from several micro meter to about 20 micro meter, the low cost deep X-ray masks are fabricated. In addition, the deep etching of the Pyrex 7740 is studied which is suitable for fabricating the thick pump chamber structures.
[1] C. P. Hsu and W. Hsu (November 1999). The Electro-Thermally Driven Micro Membrane Actuators with Two-way Deflection, ASME IMECE'99, Nashville, U.S.A..
[1] C. P. Hsu and W. Hsu (November 1999). The Electro-Thermally Driven Micro Membrane Actuators with Two-way Deflection, ASME IMECE'99, Nashville, U.S.A..
[2] C. Hsu and W. Hsu, "A Two-way Membrane-type Micro Actuator with Continuous Deflection." Journal of Micromechanics and Microengineering 2000, 10, 387-394.
[2] C. Hsu and W. Hsu, "A Two-way Membrane-type Micro Actuator with Continuous Deflection." Journal of Micromechanics and Microengineering 2000, 10, 387-394.
[3] C. P. Hsu and W. Hsu (December 2001). Influence of initial curvature and heating ratio on micromachined thermal biomorph actuation, SPIE's International Symposium on Microelectronics and MEMS, Adelaide, Australia.
[3] C. P. Hsu and W. Hsu (December 2001). Influence of initial curvature and heating ratio on micromachined thermal biomorph actuation, SPIE's International Symposium on Microelectronics and MEMS, Adelaide, Australia.
[4] C. P. Hsu, W. S. Tai, and W. Hsu (November 2002). Design and Analysis of an Electro-thermally driven Long-stretch Micro Drive with Cascaded Structure, ASME International Mechanical Engineering Congress and Exposition, New Orleans, U.S.A..
[4] C. P. Hsu, W. S. Tai, and W. Hsu (November 2002). Design and Analysis of an Electro-thermally driven Long-stretch Micro Drive with Cascaded Structure, ASME International Mechanical Engineering Congress and Exposition, New Orleans, U.S.A..
[5] C. T. Wu, W. C. Tai, C. P. Hsu, and W. Hsu (May 2003). Design and Fabrication of a Three-Dimensional Long-Stretch Micro Drive by Electroplating, SPIE International Symposium on Microtechnologies for the New Millennium 2003, Gran Canaria, Spain.
[5] C. T. Wu, W. C. Tai, C. P. Hsu, and W. Hsu (May 2003). Design and Fabrication of a Three-Dimensional Long-Stretch Micro Drive by Electroplating, SPIE International Symposium on Microtechnologies for the New Millennium 2003, Gran Canaria, Spain.
[6] C. P. Hsu, T. Liao, and W. Hsu (June 2003). Electrothermally-driven long stretch micro drive with monolithic cascaded actuation units in compact arrangement, The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, USA.
[6] C. P. Hsu, T. Liao, and W. Hsu (June 2003). Electrothermally-driven long stretch micro drive with monolithic cascaded actuation units in compact arrangement, The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, USA.
[7] C. Hsu and W. Hsu, "Instability on micromachined curved thermal bimorph structures." Journal of Micromechanics and Microengineering, 2003, 13, 955-962.
[7] C. Hsu and W. Hsu, "Instability on micromachined curved thermal bimorph structures." Journal of Micromechanics and Microengineering, 2003, 13, 955-962.
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