Thermally Driven Polysilicon Actuators for Lateral Displacement
A novel one-mask polysilicon actuators driven by thermal is developed, modeled and tested. The structure is heated current due to resistive dissipation. Thermal strain is induced is magnified by two mechanical mechanisms - lever and The device is texted in air and has a lateral 8um-displacement by applying a 4.2V dc bias. The simulation results are shown to with experimental data well. The maximum output force is with a
built-in cantilever beam and is calculated to be about 10^-6N.
[1] M. F. Wu, and W. Hsu (1996). Thermally Driven Polysilicon Actuators for Lateral Displacement, Fourth International Conference on Control, Automation, Robotics, and Vision, Singapore.