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廖挺欣 (Tingsin Liao)
廖挺欣 (Tingsin Liao)
Fabrication of Micro Actuators by Metal-Based Surface Micromachining
Fabrication of Micro Actuators by Metal-Based Surface Micromachining
面型微加工技術製作金屬微致動器
面型微加工技術製作金屬微致動器
Here, a metal-based surface micromachining technology is developed to realize two micro actuators, long-stretch micro drives and vertical comb drives, which includes lithography, sacrificial layer, and electroplating technique.
Here, a metal-based surface micromachining technology is developed to realize two micro actuators, long-stretch micro drives and vertical comb drives, which includes lithography, sacrificial layer, and electroplating technique.
Long-stretch micro drives with compact size are fabricated and tested to provide large displacements at low input voltage. The micro drives are electro-thermally driven, and fabricated through Ni electroplating process. The fabricated LSMDs have connected cascaded structures in parallel arrangement. The typical dimension is about 2000 µm x 300 µm in area. Experimental data show that the maximum displacement can reach about 202 µm at 3 volts, and the corresponding power consumption is 300 mW. The dynamic measurement shows that the LSMD can maintain its maximum displacement until 110-120Hz, and reaches the DC mode with frequency up to 3.8-4k Hz. Finally, the LSMD is proven to operate over 2 x 107 times without damage.
Long-stretch micro drives with compact size are fabricated and tested to provide large displacements at low input voltage. The micro drives are electro-thermally driven, and fabricated through Ni electroplating process. The fabricated LSMDs have connected cascaded structures in parallel arrangement. The typical dimension is about 2000 µm x 300 µm in area. Experimental data show that the maximum displacement can reach about 202 µm at 3 volts, and the corresponding power consumption is 300 mW. The dynamic measurement shows that the LSMD can maintain its maximum displacement until 110-120Hz, and reaches the DC mode with frequency up to 3.8-4k Hz. Finally, the LSMD is proven to operate over 2 x 107 times without damage.
The vertical comb drives is electrostatically driven by means of two interdigitated-comb structures, one fixed at the surface of the substrate, the other suspended by torsion beams. It is expected to have larger displacements than that of conventional parallel-plate actuators. Metal-based surface micromachining technology can fabricate VCDs without any assembly process. The gap thickness between upper and lower fingers can be simply made identical by electroplating. Thus the misalignment can be avoided. However, in final removal of seed layer, the lower fingers are attacked by acids, thus cannot stand over the substrate.
The vertical comb drives is electrostatically driven by means of two interdigitated-comb structures, one fixed at the surface of the substrate, the other suspended by torsion beams. It is expected to have larger displacements than that of conventional parallel-plate actuators. Metal-based surface micromachining technology can fabricate VCDs without any assembly process. The gap thickness between upper and lower fingers can be simply made identical by electroplating. Thus the misalignment can be avoided. However, in final removal of seed layer, the lower fingers are attacked by acids, thus cannot stand over the substrate.
[1] C. P. Hsu, T. Liao, and W. Hsu (June 2003). Electrothermally-driven long stretch micro drive with monolithic cascaded actuation units in compact arrangement, The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, USA.
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