The conventional chamber structure of a micropump consists of two passive check valves connected to an oscillating diaphragm which creates a chamber volume change. Because the movable check valves may cause many problems such as a high pressure drop across the valves, wear, fatigue of the movable parts, and more complicated fabrication processes, thus in the chamber structures of valveless micropump, we design a new version of the micromachined diffuser/nozzle elements which are used to direct flow into and out of pump chambers. By referring to the previous research, we design two new parts including rounded inlet and reentrant outlet. By means of this special design on shapes of the flow channels, a high net volume flow can be predicted to reach in a pumping cycle.