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Microfabrication Facilities
Microfabrication Facilities
Location: MEMS/Optical MEMS Lab, Nano Facility Center (Bo-Ai Campus)
Location: MEMS/Optical MEMS Lab, Nano Facility Center (Bo-Ai Campus)
Training and General Policies
Training and General Policies
Link: User Qualification Procedure (考核制度), Training Form (儀器操作訓練申請表), Operation Service Application Procedure (代工申請制度)
Link: User Qualification Procedure (考核制度), Training Form (儀器操作訓練申請表), Operation Service Application Procedure (代工申請制度)
Services
Services
Mask Aligner (K-310P-100S)
Mask Aligner (K-310P-100S)
Maker: Kyowa Riken Co. (Japan)
Maker: Kyowa Riken Co. (Japan)
Mask Size: 5”
Mask Size: 5”
Wafer Size: 4”
Wafer Size: 4”
Resolution: 1 μm
Resolution: 1 μm
Examiner: 林季亭
Examiner: 林季亭
Manager: 鄭卉芸
Spin Coater (MSC-8)
Maker: SYNREX (Taiwan)
Maker: SYNREX (Taiwan)
wafer size: 1~8”
Number of revolution: 10 to 6000 rpm
Number of revolution: 10 to 6000 rpm
Number of Steps: Programmable 10 steps
Number of Steps: Programmable 10 steps
Examiner: 林季亭
Examiner: 林季亭
Manager: 鄭卉芸
Spin Coater for Thick Photoresist (RC-8)
Spin Coater for Thick Photoresist (RC-8)
Maker: Karl Suss (Germany)
Maker: Karl Suss (Germany)
Wafer size: 4"
Wafer size: 4"
Max. Spin Speed: 5000 rpm
Max. Spin Speed: 5000 rpm
Max. Acceleration: 3000 rpm/s
Max. Acceleration: 3000 rpm/s
8 programs
8 programs
Manager: 劉哲甫
Manager: 劉哲甫
Link: Standard Operating Procedure
Link: Standard Operating Procedure
Surface Profiler (ET-4000)
Surface Profiler (ET-4000)
Maker: Kosaka Laboratory Ltd. (Japan)
Maker: Kosaka Laboratory Ltd. (Japan)
Max. Sample Size: 210 × 210 mm to 300 × 400 mm
Max. Sample Size: 210 × 210 mm to 300 × 400 mm
Repeatability: 1 σ within 0.5 nm
Repeatability: 1 σ within 0.5 nm
Measuring Range: Z: 100 μm; X: 100 mm; Y stroke: 150 to 400 mm
Measuring Range: Z: 100 μm; X: 100 mm; Y stroke: 150 to 400 mm
Resolution: Z: 0.1 nm; X: 0.01 μm
Resolution: Z: 0.1 nm; X: 0.01 μm
Measuring Force: 0.5 μN to 500 μN
Measuring Force: 0.5 μN to 500 μN
Examiner: 游晴程
Examiner: 游晴程
Manager: 游晴程
Link: Standard Operating Procedure
Link: Standard Operating Procedure
MEMS Device Testing Facilities
MEMS Device Testing Facilities
Location: Room 511, Engineering Building 5
Location: Room 511, Engineering Building 5
Training and General Policies
Training and General Policies
Services
Services
Optical Microscope & Probe Station
Optical Microscope & Probe Station
Eyepiece: 10X
Eyepiece: 10X
Objective: 2X, 10X, 20X, 50X
Objective: 2X, 10X, 20X, 50X
Manager: 劉哲甫
Manager: 劉哲甫
Shaker (LDS V406)
Shaker (LDS V406)
Maker: Brüel & Kjær (Denmark)
Maker: Brüel & Kjær (Denmark)
Sine force peak: 196 N
Sine force peak: 196 N
Max random force rms: 89 N
Max random force rms: 89 N
Max acceleration sine peak: 100 gn
Max acceleration sine peak: 100 gn
Velocity sine peak: 1.78 m/s
Velocity sine peak: 1.78 m/s
Displacement continuous pk-pk: 17.6 mm
Displacement continuous pk-pk: 17.6 mm
Moving element mass: 0.2 kg
Moving element mass: 0.2 kg
Usable frequency range: 5-9,000 Hz
Usable frequency range: 5-9,000 Hz
Manager: 劉哲甫
Manager: 劉哲甫
Link: Standard Operating Procedure
Link: Standard Operating Procedure
Contact Angle Analysis Systems (FTA125)
Maker: First Ten Angstroms (U.S.A.)
Maker: First Ten Angstroms (U.S.A.)
Sessile Drop Mode and Pendant Drop Mode
Sessile Drop Mode and Pendant Drop Mode
Contact Angle Range: 0-180°
Contact Angle Range: 0-180°
Contact Angle Resolution: ≦0.01°
Contact Angle Resolution: ≦0.01°
Surface Tension Range: 0-2000 mN/m
Surface Tension Range: 0-2000 mN/m
Surface Tension Accuracy: +/-0.5%
Surface Tension Accuracy: +/-0.5%
Surface Tension Resolution: 0.1%
Surface Tension Resolution: 0.1%
Manager: 游晴程
Manager: 游晴程
Technician (代工): 劉哲甫
Technician (代工): 劉哲甫
Link: Standard Operating Procedure
Link: Standard Operating Procedure
Microfluidics Facilities
Microfluidics Facilities
Location: Room 529, Engineering Building 5
Location: Room 529, Engineering Building 5
Cell Culture Facilities
Cell Culture Facilities
Location: Room 505, Engineering Building 5
Location: Room 505, Engineering Building 5
Services
Services
Refrigerated Centrifuge (Heraeus Megafuge 16R)
Refrigerated Centrifuge (Heraeus Megafuge 16R)
Maker: Thermo Scientific (U.S.A.)
Maker: Thermo Scientific (U.S.A.)
Max. Speed: 15200 rpm
Max. Speed: 15200 rpm
Capacity: 1.6 L (4 x 400 μL)
Capacity: 1.6 L (4 x 400 μL)
Manager: 劉哲甫
Manager: 劉哲甫
Link: Standard Operating Procedure
Link: Standard Operating Procedure
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