For the electrical property, the resisitivies of these two composites, 126.56×10-9Ω-m for Ni-diamond and 156.78×10-9Ω-m for Ni-CNTs, respectively, indicate both films have better electrical conductivity than the doped polysilicon (~10×10-6Ω-m) Based on the 4-point probe measurement, it is found that the intrinsic bulk resistivities of the nanocomposite thin films can be characterized using Maxwell-Wagner model for a two phase mixture. Therefore, with the enhancements both on the mechanical and physical properties, the novel nanocomposites show the potential applications on the MEMS, especially for high-frequency resonant device fabrication.