Embedded Files
溫士逸 (Shihi Yi Wen)
溫士逸 (Shihi Yi Wen)
The Magnetic Membrane Microactuator
The Magnetic Membrane Microactuator
電磁式薄膜微致動器
電磁式薄膜微致動器
The magnetic membrane microactuators are designed, fabricated and tested here. The design concept is to bond a Sm-Co permanent magnet to a movable SU-8 membrane which has not been used as membrane material in magnetic actuator before. Then the modeling and finite element analysis are used to find the magnetic field and membrane mechanical behaviors.
The magnetic membrane microactuators are designed, fabricated and tested here. The design concept is to bond a Sm-Co permanent magnet to a movable SU-8 membrane which has not been used as membrane material in magnetic actuator before. Then the modeling and finite element analysis are used to find the magnetic field and membrane mechanical behaviors.
The planar coils fabricated by surface micromachining have high resistance and power consumption. To reduce the power consumption, the high-aspect-ratio microcoils are required. Thus, the UV-LIGA processes are developed to fabricate the high-aspect-ratio microcoils. Then SU-8 membranes are fabricated by standard bulk micromachining techniques. Finally, the parts of planar coils and parts of SU-8 membranes are glued to form the magnetic microactuators.
The planar coils fabricated by surface micromachining have high resistance and power consumption. To reduce the power consumption, the high-aspect-ratio microcoils are required. Thus, the UV-LIGA processes are developed to fabricate the high-aspect-ratio microcoils. Then SU-8 membranes are fabricated by standard bulk micromachining techniques. Finally, the parts of planar coils and parts of SU-8 membranes are glued to form the magnetic microactuators.
Page updated
Google Sites
Report abuse