Two-way deflecting bimorph structures are designed with fixed boundary condition and different heating regions. Different structures, beams and membranes, are designed, fabricated and tested. Effects due to heating area ratio and thickness ratio on the maximum deflection of bimorph structures are studied by simulations and experiments. Several models are simulated by a FEM program, ANSYS 5.5. In experimental, an in-situ temperature measurement technique is designed on testing structures. The results of simulations and experiments will be compared with each other. Initial curvature effect on two-way deflecting will be studied experimentally.