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林軒宇 (Hsuan-Yu Lin)
林軒宇 (Hsuan-Yu Lin)
Development of a High Frequency Fatigue Test Method
Development of a High Frequency Fatigue Test Method
高頻振動式微結構疲勞測試方法的研發
高頻振動式微結構疲勞測試方法的研發
Up to now, there are more and more commercialized micro-electro-mechanical systems (MEMS) products that part of the consisted components such as microactuator and microsensor need long-term and repetitive operation. In order to ensure the long-term reliability of these MEMS products, the fatigue test plays an important role.
Up to now, there are more and more commercialized micro-electro-mechanical systems (MEMS) products that part of the consisted components such as microactuator and microsensor need long-term and repetitive operation. In order to ensure the long-term reliability of these MEMS products, the fatigue test plays an important role.
In this study, employing the excitation method, a new and fast fatigue test is proposed and established. Furthermore, the test criterion and feasibility study are also discussed and demonstrated by the common MEMS-materials of electroplated nickel and single-crystal silicon. According to the experimental results, the derived S-N curve of single-crystal silicon conforms to the ones from previous literatures.
In this study, employing the excitation method, a new and fast fatigue test is proposed and established. Furthermore, the test criterion and feasibility study are also discussed and demonstrated by the common MEMS-materials of electroplated nickel and single-crystal silicon. According to the experimental results, the derived S-N curve of single-crystal silicon conforms to the ones from previous literatures.
[1] H.-Y. Lin, Y.-C. Lee, and W. Hsu (July 2010). A Rapid Fatigue Test Method on Microstructures, 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, West Australia.
[2] Y.-C. Shieh, H.-Y. Lin, W. Hsu, and Y.-H. Lin (September 2014). A rapid high-cycle fatigue test method for microstructure. The 40th International Conference on Micro and Nano Engineering, Lausanne, Switzerland.
[2] Y.-C. Shieh, H.-Y. Lin, W. Hsu, and Y.-H. Lin (September 2014). A rapid high-cycle fatigue test method for microstructure. The 40th International Conference on Micro and Nano Engineering, Lausanne, Switzerland.
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