The research focuses on the optical data storage system by near field recording that can break through the diffraction limit. The MO (Magneto-Optic) pickup head is studied and fabricated by MEMS(MicroElectroMechanical System)technology. The MO pickup head combines (1) air bearing, (2) microcoils, (3) nano-aperture, (4) Supersphere Solid Immersion Lens (SSIL). The proposed process is a batch process and does not need assembly to achieve a MO pick up head combining SSIL, nano aperture, air bearing and magnetic coils for high-density data storage. And a new process is also proposed to fabricate the SSIL.