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郭武政 (WuCheng Kuo)
郭武政 (WuCheng Kuo)
The study on the thermopile-based biosensor
The study on the thermopile-based biosensor
熱電堆式生化感測器之研究
熱電堆式生化感測器之研究
A thermopile-based sensor is fabricated using semiconductor fabrication technology and MEMS technology. The sensor is used for bio-application. When the biochemical reaction happens, the chemical reactive heat will occurs. The heat will be detected by the thermopile on the sensor. The heat will be transferred into the electrical voltage as the output signal. According to the amount of the signal and the total time of the reaction, what kind of the reaction happens and the concentration of the reactant will be known.
A thermopile-based sensor is fabricated using semiconductor fabrication technology and MEMS technology. The sensor is used for bio-application. When the biochemical reaction happens, the chemical reactive heat will occurs. The heat will be detected by the thermopile on the sensor. The heat will be transferred into the electrical voltage as the output signal. According to the amount of the signal and the total time of the reaction, what kind of the reaction happens and the concentration of the reactant will be known.
On the aspect of the sensor structure design, the hot junction of the thermopile is placed on a SiNx membrane. The air is used as the heat isolation material. The SU8 is used as the chamber material. Its advantage is thick and low thermal conductivity.
On the aspect of the sensor structure design, the hot junction of the thermopile is placed on a SiNx membrane. The air is used as the heat isolation material. The SU8 is used as the chamber material. Its advantage is thick and low thermal conductivity.
Besides, a three-layer membrane composed of Si3N4、polysilicon、Si3n4 is fabricated successfully. It can replace SiNx membrane if not available. It’s initial stress is very small so the membrane is very flat.
Besides, a three-layer membrane composed of Si3N4、polysilicon、Si3n4 is fabricated successfully. It can replace SiNx membrane if not available. It’s initial stress is very small so the membrane is very flat.
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