2012THW

吳族豪 (Tzu-Hau Wu)

Feasibility study of Applying TiC Film on MEMS Inertial Switch

應用碳化鈦導電薄膜於微機電碰撞開關之可行性研究

This study, we present an inertial switch which employing titanium carbide (TiC) protective thin film to increase abrasion resistance, and simultaneously, autoxidation. Our objective is to enhance the life cycle of inertial switch.

Both 30 nanometer film thickness, TiC has better performance than Nickel in Microhardness and Microscratch tests. TiC coating shows Vickers hardness values increased by 300% than Nickel coating. And the volume of material removed, TiC coatings is 50% lower than Nickel coating.

The isothermal oxidation and conductivity of TiC film was carried out at low temperature of 100-500℃ at atmospheric. Results shows that the TiC film at temperature higher than 300℃ will completely oxidized, temperature lower than 200℃ the conductivity varies unobvious. We also found that the resistance fluctuates according to the temperature change decrease when film thickness rising.

Design an MEMs switch for impact fatigue test and oxidation protect test. Impact fatigue test shows, both 30 nanometer thickness, coating TiC can improve the switch life cycle 700% than coating Nickel. And oxidation protect test shows, both 30 nanometer thickness, coating TiC can prolong oxidation time over 200% than coating Nickel.