Embedded Files
吳松岳 (Sung-Yueh Wu)
吳松岳 (Sung-Yueh Wu)
sywu0820@gmail.com
The performance enhancement and novel applications of LC transducers
The performance enhancement and novel applications of LC transducers
電感電容迴路式傳感器之性能提升與應用拓展
電感電容迴路式傳感器之性能提升與應用拓展
This dissertation focuses on the performance enhancement and novel applications of LC transducers (LC sensor, LC actuator, and LC transducing system). An LC strain sensor with a novel encapsulated serpentine helical inductor is presented. The helical coil of the inductor is formed by serpentine wire to reduce the radial rigidity. Also the inductor is encapsulated by material with high Poisson’s ratio. When an axial deformation is applied to this encapsulated inductor, the cross-sectional area of the helical coil will have more evident change due to lower radial rigidity and encapsulation. Therefore, the variation of inductance or LC resonant frequency can be enhanced to provide better sensitivity of the LC strain sensor. By using PDMS as encapsulated material, it is shown that the sensitivity of conventional helical inductor with or without encapsulation are both about 73.0 kHz/0.01ε, which means encapsulation on conventional helical inductor does not help to improve the sensitivity due to high radial rigidity of the conventional helical coil. It is also found that the encapsulated serpentine helical inductor has better sensitivity (121.9 kHz/0.01ε) than the serpentine helical inductor without encapsulation (62.7 kHz/0.01ε), which verifies the sensitivity enhancing capability of the proposed encapsulated serpentine helical inductor design. The error between simulation and measurement results on sensitivity of LC strain sensor with the encapsulated serpentine inductor is about 5.57%, which verifies the accuracy of the simulation model. The wireless sensing capability is also successfully demonstrated.
This dissertation focuses on the performance enhancement and novel applications of LC transducers (LC sensor, LC actuator, and LC transducing system). An LC strain sensor with a novel encapsulated serpentine helical inductor is presented. The helical coil of the inductor is formed by serpentine wire to reduce the radial rigidity. Also the inductor is encapsulated by material with high Poisson’s ratio. When an axial deformation is applied to this encapsulated inductor, the cross-sectional area of the helical coil will have more evident change due to lower radial rigidity and encapsulation. Therefore, the variation of inductance or LC resonant frequency can be enhanced to provide better sensitivity of the LC strain sensor. By using PDMS as encapsulated material, it is shown that the sensitivity of conventional helical inductor with or without encapsulation are both about 73.0 kHz/0.01ε, which means encapsulation on conventional helical inductor does not help to improve the sensitivity due to high radial rigidity of the conventional helical coil. It is also found that the encapsulated serpentine helical inductor has better sensitivity (121.9 kHz/0.01ε) than the serpentine helical inductor without encapsulation (62.7 kHz/0.01ε), which verifies the sensitivity enhancing capability of the proposed encapsulated serpentine helical inductor design. The error between simulation and measurement results on sensitivity of LC strain sensor with the encapsulated serpentine inductor is about 5.57%, which verifies the accuracy of the simulation model. The wireless sensing capability is also successfully demonstrated.
For the LC actuator, a novel wireless EWOD/DEP chips is presented. The wireless EWOD/DEP chips are wirelessly powered and controlled through LC circuits with one-to-many transmitter-receiver coupling. When the input frequency is close to one of the resonance frequencies of receiving LC circuits, the induced voltage on the corresponding EWOD/DEP electrode will increase evidently due to the resonance. Therefore, the electrodes can be selectively and sequentially activated to provide sufficient EWOD or DEP forces to manipulate droplet or liquid by modulating the input frequency. Here droplet transporting, splitting, and merging are successfully demonstrated with 5 receiving LC circuits at different input frequencies (1210 Hz - 1920 Hz). The liquid pumping with multiple electrodes by wireless DEP is also demonstrated with 5 receiving LC circuits at higher input frequencies (51.2 kHz- 76.1 kHz). Furthermore, the liquid pumping with a continuous meandered electrode by wireless DEP is demonstrated through the resonant frequency shifting effect. It shows that the liquid pumping distance on a continuous electrode also can be tuned by proper frequency modulation. The transmitting inductor in the one-to-many transmitter-receiver coupling design proposed here is much larger than the total sizes of receiving inductors, therefore, receiving inductors can be easily covered and coupled by the transmitting inductor, which is a necessary feature for in-vivo applications in the future.
For the LC actuator, a novel wireless EWOD/DEP chips is presented. The wireless EWOD/DEP chips are wirelessly powered and controlled through LC circuits with one-to-many transmitter-receiver coupling. When the input frequency is close to one of the resonance frequencies of receiving LC circuits, the induced voltage on the corresponding EWOD/DEP electrode will increase evidently due to the resonance. Therefore, the electrodes can be selectively and sequentially activated to provide sufficient EWOD or DEP forces to manipulate droplet or liquid by modulating the input frequency. Here droplet transporting, splitting, and merging are successfully demonstrated with 5 receiving LC circuits at different input frequencies (1210 Hz - 1920 Hz). The liquid pumping with multiple electrodes by wireless DEP is also demonstrated with 5 receiving LC circuits at higher input frequencies (51.2 kHz- 76.1 kHz). Furthermore, the liquid pumping with a continuous meandered electrode by wireless DEP is demonstrated through the resonant frequency shifting effect. It shows that the liquid pumping distance on a continuous electrode also can be tuned by proper frequency modulation. The transmitting inductor in the one-to-many transmitter-receiver coupling design proposed here is much larger than the total sizes of receiving inductors, therefore, receiving inductors can be easily covered and coupled by the transmitting inductor, which is a necessary feature for in-vivo applications in the future.
For LC transducing system, a passive shock recorder is presented to record shock events for tens of Gs with wireless reading and wireless resetting capabilities. With a micro mechanical-latch shock switch electrically connected to a sensing LC circuit, the shock event that leads to different latching states can be recorded and wirelessly read through the LC resonance frequency. With a micro electro-thermal actuator electrically connected to a wirelessly powered actuating LC circuit, the energy can be wirelessly sent to the micro actuator to provide the necessary unlatched force. By integrating the mechanical-latch shock switch and actuator with LC circuits, the latching state can be reset through the wireless actuation. Therefore, the shock recorder can be used repeatedly, which is helpful for logistics & civil structure monitoring. Here the mechanical-latch shock switch is designed to have two-level shock recording capability. The fabrication of shock switch and actuator are achieved by Ni-based surface micromachining process. When the acceleration reaches 28.06 G, the latching state changes from the original state to the first latching state. The resonant frequency of sensing LC circuit is found to switch from 10.14 MHz to 9.16 MHz correspondingly. Further applying acceleration up to 37.10 G, the latching state changes from the first state to the second latching state, and the resonant frequency shifts to 7.83 MHz. Then, with a current 2.07 AAC wirelessly induced in the actuating LC circuit, the micro electro-thermal actuator is shown to provide sufficient displacement to reset the shock switch from latched state back to the original unlatched state, and the resonant frequency is switched back to 10.14 MHz. The fabricated shock recorder is repeatedly tested for five times. Wireless reading, resetting and shock recording capabilities are successfully verified.
For LC transducing system, a passive shock recorder is presented to record shock events for tens of Gs with wireless reading and wireless resetting capabilities. With a micro mechanical-latch shock switch electrically connected to a sensing LC circuit, the shock event that leads to different latching states can be recorded and wirelessly read through the LC resonance frequency. With a micro electro-thermal actuator electrically connected to a wirelessly powered actuating LC circuit, the energy can be wirelessly sent to the micro actuator to provide the necessary unlatched force. By integrating the mechanical-latch shock switch and actuator with LC circuits, the latching state can be reset through the wireless actuation. Therefore, the shock recorder can be used repeatedly, which is helpful for logistics & civil structure monitoring. Here the mechanical-latch shock switch is designed to have two-level shock recording capability. The fabrication of shock switch and actuator are achieved by Ni-based surface micromachining process. When the acceleration reaches 28.06 G, the latching state changes from the original state to the first latching state. The resonant frequency of sensing LC circuit is found to switch from 10.14 MHz to 9.16 MHz correspondingly. Further applying acceleration up to 37.10 G, the latching state changes from the first state to the second latching state, and the resonant frequency shifts to 7.83 MHz. Then, with a current 2.07 AAC wirelessly induced in the actuating LC circuit, the micro electro-thermal actuator is shown to provide sufficient displacement to reset the shock switch from latched state back to the original unlatched state, and the resonant frequency is switched back to 10.14 MHz. The fabricated shock recorder is repeatedly tested for five times. Wireless reading, resetting and shock recording capabilities are successfully verified.
This dissertation focuses on the performance enhancement and novel applications of LC sensor, LC actuator, and LC transducing system. To the best of our knowledge, the first design that utilizes the special geometry of the inductor to enhance the sensitivity is presented here. The first wireless DEP and analogically liquid channel pumping is also realized. Furthermore, the first design that integrates both LC sensing and LC actuating capabilities is developed as a wirelessly readable and resettable shock recorder.
This dissertation focuses on the performance enhancement and novel applications of LC sensor, LC actuator, and LC transducing system. To the best of our knowledge, the first design that utilizes the special geometry of the inductor to enhance the sensitivity is presented here. The first wireless DEP and analogically liquid channel pumping is also realized. Furthermore, the first design that integrates both LC sensing and LC actuating capabilities is developed as a wirelessly readable and resettable shock recorder.
Journal papers
Journal papers
1. S.-Y. Wu, C. Yang, W. Hsu, and L. Lin, “3D Printed Microelectronics for Integrated Circuitry and Passive Wireless Sensors,” Microsystems and Nanoengineering, Vol. 1, No. 15013, 2015. (Nature Publishing Group, selected as FEATURED ARTICLE)
1. S.-Y. Wu, C. Yang, W. Hsu, and L. Lin, “3D Printed Microelectronics for Integrated Circuitry and Passive Wireless Sensors,” Microsystems and Nanoengineering, Vol. 1, No. 15013, 2015. (Nature Publishing Group, selected as FEATURED ARTICLE)
2. S.-Y. Wu, C.-Y. Hung, and W. Hsu, “A Wirelessly Readable and Resettable Shock Recorder through the Integration of LC Circuits and MEMS Devices,” Smart Materials and Structures, Vol. 23, No. 095030, 2014. (IF = 2.502, ranking 8/56)
2. S.-Y. Wu, C.-Y. Hung, and W. Hsu, “A Wirelessly Readable and Resettable Shock Recorder through the Integration of LC Circuits and MEMS Devices,” Smart Materials and Structures, Vol. 23, No. 095030, 2014. (IF = 2.502, ranking 8/56)
3. S.-Y. Wu and W. Hsu, “Wireless EWOD/DEP Chips Powered and Controlled through LC Circuits and Frequency Modulation,” Lab on a Chip, Vol. 14, 2014, pp. 3101-3109. (IF = 6.115, ranking 6/76)
3. S.-Y. Wu and W. Hsu, “Wireless EWOD/DEP Chips Powered and Controlled through LC Circuits and Frequency Modulation,” Lab on a Chip, Vol. 14, 2014, pp. 3101-3109. (IF = 6.115, ranking 6/76)
4. S.-Y. Wu and W. Hsu, “Design and Characterization of LC Strain Sensors with Novel Inductor for Sensitivity Enhancement,” Smart Materials and Structures, Vol. 22, No. 105015, 2013. (selected as FEATURED ARTICLE, IF = 2.502, ranking 8/56)
4. S.-Y. Wu and W. Hsu, “Design and Characterization of LC Strain Sensors with Novel Inductor for Sensitivity Enhancement,” Smart Materials and Structures, Vol. 22, No. 105015, 2013. (selected as FEATURED ARTICLE, IF = 2.502, ranking 8/56)
Conference papers
Conference papers
1. S.-Y. Wu, C. Yang, W. Hsu, and L. Lin, “RF Wireless LC Tank Sensors Fabricated by 3D Additive Manufacturing,” The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), Alaska, USA, June 21-25, 2015. (accepted, blind review)
1. S.-Y. Wu, C. Yang, W. Hsu, and L. Lin, “RF Wireless LC Tank Sensors Fabricated by 3D Additive Manufacturing,” The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), Alaska, USA, June 21-25, 2015. (accepted, blind review)
2. Y.-C. Shieh, T. H. Wu, S.-Y. Wu, W. Hsu, and Y. H. Lin, “Reliability Improvement by Using TIC Film in MEMS Impact Switch,” The 10th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2015), Xi’an, China, Apr. 7-11, 2015.
2. Y.-C. Shieh, T. H. Wu, S.-Y. Wu, W. Hsu, and Y. H. Lin, “Reliability Improvement by Using TIC Film in MEMS Impact Switch,” The 10th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2015), Xi’an, China, Apr. 7-11, 2015.
3. C. Yang, S.-Y. Wu, C. Glick, Y. S. Choi, W. Hsu, and L. Lin, “3D Printed RF Passive Components by Liquid Metal Filling,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2015), Estoril, Portugal, Jan. 18-22, 2015, pp. 261-264. (co-first author, blind review)
3. C. Yang, S.-Y. Wu, C. Glick, Y. S. Choi, W. Hsu, and L. Lin, “3D Printed RF Passive Components by Liquid Metal Filling,” The 28th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2015), Estoril, Portugal, Jan. 18-22, 2015, pp. 261-264. (co-first author, blind review)
4. S.-Y. Wu, C.-Y. Hung, Y.-C. Shieh, and W. Hsu, “Wireless Shock Recording through The Integration of LC Circuits and Micro Mechanical-latch Switch,” The 9th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2014), Hawaii, USA, Apr. 13-16, 2014.
4. S.-Y. Wu, C.-Y. Hung, Y.-C. Shieh, and W. Hsu, “Wireless Shock Recording through The Integration of LC Circuits and Micro Mechanical-latch Switch,” The 9th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2014), Hawaii, USA, Apr. 13-16, 2014.
5. S.-Y. Wu, C.-Y. Hung, and W. Hsu, “A Wireless Micro Thermal Actuator Powered through LC Circuits,” The 9th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2014), Hawaii, USA, Apr. 13-16, 2014.
5. S.-Y. Wu, C.-Y. Hung, and W. Hsu, “A Wireless Micro Thermal Actuator Powered through LC Circuits,” The 9th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2014), Hawaii, USA, Apr. 13-16, 2014.
6. M.-S. Lee, S.-Y. Wu, T.-H. Wong, W. Hsu, and T.-K. Chung, “A Novel Guiding Device for Distal Locking of Intramedullary Nails,” The 11th IEEE Conference on Sensors (IEEE Sensors 2012), Taipei, Taiwan, Oct. 28-31, 2012, pp. 1-4.
6. M.-S. Lee, S.-Y. Wu, T.-H. Wong, W. Hsu, and T.-K. Chung, “A Novel Guiding Device for Distal Locking of Intramedullary Nails,” The 11th IEEE Conference on Sensors (IEEE Sensors 2012), Taipei, Taiwan, Oct. 28-31, 2012, pp. 1-4.
7. S.-Y. Wu and W. Hsu, “A Wireless EWOD Chip Powered Through LC Circuits,” The 6th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2012), Nanjing, China, July 8-11, 2012.
7. S.-Y. Wu and W. Hsu, “A Wireless EWOD Chip Powered Through LC Circuits,” The 6th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2012), Nanjing, China, July 8-11, 2012.
8. S.-Y. Wu and W. Hsu, “Sensitivity Enhancement of LC Sensors with Novel Inductor Design,” The 10th IEEE Conference on Sensors (IEEE Sensors 2011), Limerick, Ireland, Oct. 28-31, 2011, pp. 468-471.
8. S.-Y. Wu and W. Hsu, “Sensitivity Enhancement of LC Sensors with Novel Inductor Design,” The 10th IEEE Conference on Sensors (IEEE Sensors 2011), Limerick, Ireland, Oct. 28-31, 2011, pp. 468-471.
9. 吳松岳，洪振淵，謝一全，徐文祥，2013年11月，電感電容迴路式被動無線碰撞感測開關，第十六屆全國機構與機器設計學術研討會，清華大學，新竹。
9. 吳松岳，洪振淵，謝一全，徐文祥，2013年11月，電感電容迴路式被動無線碰撞感測開關，第十六屆全國機構與機器設計學術研討會，清華大學，新竹。
10. 吳松岳，洪振淵，徐文祥，2013年11月，電感電容迴路式被動無線微熱致動，第十六屆全國機構與機器設計學術研討會，清華大學，新竹。
10. 吳松岳，洪振淵，徐文祥，2013年11月，電感電容迴路式被動無線微熱致動，第十六屆全國機構與機器設計學術研討會，清華大學，新竹。
Patents
Patents
1. M.-S. Lee, S.-Y. Wu, W. Hsu, T.-K. Chung, and C.-P. Wu, “Locating System for Locking Hole of Intramedullary Nail,” United States Patent. (Reviewing)
1. M.-S. Lee, S.-Y. Wu, W. Hsu, T.-K. Chung, and C.-P. Wu, “Locating System for Locking Hole of Intramedullary Nail,” United States Patent. (Reviewing)
2. 李孟學、吳松岳、王子康、徐文祥、鍾添淦，「骨髓內釘固定孔定位系統」，中華民國專利申請案號：103107101。
2. 李孟學、吳松岳、王子康、徐文祥、鍾添淦，「骨髓內釘固定孔定位系統」，中華民國專利申請案號：103107101。
3. 吳松岳、徐文祥，「應變感測裝置」，中華民國專利I414762。
3. 吳松岳、徐文祥，「應變感測裝置」，中華民國專利I414762。
Others
Others
1. 吳松岳、徐文祥，「從微機電系統到跨領域研究」，電子月刊，第十九卷，第一期，2013，pp 58-71。
1. 吳松岳、徐文祥，「從微機電系統到跨領域研究」，電子月刊，第十九卷，第一期，2013，pp 58-71。
Page updated
Google Sites
Report abuse