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許鎮鵬 (Chenpeng Hsu)
許鎮鵬 (Chenpeng Hsu)
Design and Fabrication of Novel Electro-Thermal Micro Actuators
Design and Fabrication of Novel Electro-Thermal Micro Actuators
多種新型電熱式微致動器之設計與製造
多種新型電熱式微致動器之設計與製造
In general, the typical actuation principles of microactuators can be categorized into four folds, electrostatic, piezoelectric, magnetic, and thermal actuations. Among these principles, miniaturization and integration of electrostatic and thermal microactuators with electronic circuits are more feasible. In addition, there are more options of materials for these electrostatic and thermal transducers in microfabrication. In this dissertation, several kinds of novel electro-thermal microactuators are designed, analyzed, fabricated, and characterized.
In general, the typical actuation principles of microactuators can be categorized into four folds, electrostatic, piezoelectric, magnetic, and thermal actuations. Among these principles, miniaturization and integration of electrostatic and thermal microactuators with electronic circuits are more feasible. In addition, there are more options of materials for these electrostatic and thermal transducers in microfabrication. In this dissertation, several kinds of novel electro-thermal microactuators are designed, analyzed, fabricated, and characterized.
From previous literature, thermal bimorph structure shows impressive feature of large deformation at elevated temperature. Most of thermal bimorph microactuators and their applications are designed in cantilever beam type. Here, micromechanical behaviors of thermal bimorph structures in beam or membrane type are characterized in detail by finite element analyses and experiments. Three factors, thermal-bimorph-effect activating region, boundary condition, and initial deflection show significant influences on the thermal mechanical behaviors of bimorph structures in analyses and experiments. By properly designing and combining two or three of these factors, two kinds of novel two-way membrane-type microactuators are designed, fabricated, and tested. The first membrane microactuator shows two-way continuous deflections, and the other one shows two-way deflections with snap-through behaviors.
From previous literature, thermal bimorph structure shows impressive feature of large deformation at elevated temperature. Most of thermal bimorph microactuators and their applications are designed in cantilever beam type. Here, micromechanical behaviors of thermal bimorph structures in beam or membrane type are characterized in detail by finite element analyses and experiments. Three factors, thermal-bimorph-effect activating region, boundary condition, and initial deflection show significant influences on the thermal mechanical behaviors of bimorph structures in analyses and experiments. By properly designing and combining two or three of these factors, two kinds of novel two-way membrane-type microactuators are designed, fabricated, and tested. The first membrane microactuator shows two-way continuous deflections, and the other one shows two-way deflections with snap-through behaviors.
Generally, output displacement and exerting force of single microactuator is limited that may restrict their applications. Here, a monolithic electro-thermal long stretch micro drive (LSMD) capable of generating large in-plane displacements in efficient manner is designed, fabricated, and characterized. The design concept comes from cascading actuation units to accumulate output displacements and paralleling these micromechanical structures to double the exerting forces. In experiments, thick electroplated nickel LSMDs are fabricated by metal-based surface micromachining which significantly improves the mechanical strength of the micro drive and output forces. The applied voltage and output displacement shows good linearity in analyses and experiments. The operation temperatures, exerting forces, and geometrical parameters are also investigated and discussed. Comparing to previous reported microactuators, the proposed micro drives can exhibit large displacements at a compact size (over 200 mm / mm²).
Generally, output displacement and exerting force of single microactuator is limited that may restrict their applications. Here, a monolithic electro-thermal long stretch micro drive (LSMD) capable of generating large in-plane displacements in efficient manner is designed, fabricated, and characterized. The design concept comes from cascading actuation units to accumulate output displacements and paralleling these micromechanical structures to double the exerting forces. In experiments, thick electroplated nickel LSMDs are fabricated by metal-based surface micromachining which significantly improves the mechanical strength of the micro drive and output forces. The applied voltage and output displacement shows good linearity in analyses and experiments. The operation temperatures, exerting forces, and geometrical parameters are also investigated and discussed. Comparing to previous reported microactuators, the proposed micro drives can exhibit large displacements at a compact size (over 200 mm / mm²).
[1] C. P. Hsu and W. Hsu (November 1999). The Electro-Thermally Driven Micro Membrane Actuators with Two-way Deflection, ASME IMECE'99, Nashville, U.S.A..
[1] C. P. Hsu and W. Hsu (November 1999). The Electro-Thermally Driven Micro Membrane Actuators with Two-way Deflection, ASME IMECE'99, Nashville, U.S.A..
[2] C. Hsu and W. Hsu, "A Two-way Membrane-type Micro Actuator with Continuous Deflection." Journal of Micromechanics and Microengineering 2000, 10, 387-394.
[2] C. Hsu and W. Hsu, "A Two-way Membrane-type Micro Actuator with Continuous Deflection." Journal of Micromechanics and Microengineering 2000, 10, 387-394.
[3] C. P. Hsu and W. Hsu (December 2001). Influence of initial curvature and heating ratio on micromachined thermal biomorph actuation, SPIE's International Symposium on Microelectronics and MEMS, Adelaide, Australia.
[3] C. P. Hsu and W. Hsu (December 2001). Influence of initial curvature and heating ratio on micromachined thermal biomorph actuation, SPIE's International Symposium on Microelectronics and MEMS, Adelaide, Australia.
[4] C. P. Hsu, W. S. Tai, and W. Hsu (November 2002). Design and Analysis of an Electro-thermally driven Long-stretch Micro Drive with Cascaded Structure, ASME International Mechanical Engineering Congress and Exposition, New Orleans, U.S.A..
[4] C. P. Hsu, W. S. Tai, and W. Hsu (November 2002). Design and Analysis of an Electro-thermally driven Long-stretch Micro Drive with Cascaded Structure, ASME International Mechanical Engineering Congress and Exposition, New Orleans, U.S.A..
[5] C. T. Wu, W. C. Tai, C. P. Hsu, and W. Hsu (May 2003). Design and Fabrication of a Three-Dimensional Long-Stretch Micro Drive by Electroplating, SPIE International Symposium on Microtechnologies for the New Millennium 2003, Gran Canaria, Spain.
[5] C. T. Wu, W. C. Tai, C. P. Hsu, and W. Hsu (May 2003). Design and Fabrication of a Three-Dimensional Long-Stretch Micro Drive by Electroplating, SPIE International Symposium on Microtechnologies for the New Millennium 2003, Gran Canaria, Spain.
[6] C. P. Hsu, T. Liao, and W. Hsu (June 2003). Electrothermally-driven long stretch micro drive with monolithic cascaded actuation units in compact arrangement, The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, USA.
[6] C. P. Hsu, T. Liao, and W. Hsu (June 2003). Electrothermally-driven long stretch micro drive with monolithic cascaded actuation units in compact arrangement, The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, USA.
[7] C. Hsu and W. Hsu, "Instability on micromachined curved thermal bimorph structures." Journal of Micromechanics and Microengineering, 2003, 13, 955-962.
[7] C. Hsu and W. Hsu, "Instability on micromachined curved thermal bimorph structures." Journal of Micromechanics and Microengineering, 2003, 13, 955-962.
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