2003CCW

王俊傑 (Chun Chieh Wang)

Development of A Micro Positioner by Long Stretch Micro Drives

大伸展式微熱致動器在微定位裝置上的研究

A metal-base surface micromaching technology is developed to realize a long-stretch micro drives (LSMD) and a micro positioner device is designed and fabricated here. This process includes lithography , sacrificial layer and electroplating technique. The thickness of structures is increased to 20 um which is possible to induce larger output force and displacement of LSMD.

Because the increasing of the thickness of structures may cause many problems in fabrication, thus we improve some processes of fabrication such as lithography and electroplating.

Here, the behavior of LSMD is simulated and tested. The stiffness of LSMD approach to a nonlinear behavior and the output force is decreasing with the increasing of displacement under the controlled voltage.

The bayonet of the actuators of positioner has long structure that induces the bayonet stick with the wafer surface. And the adhesion force between seed layer Cu and structure Ni is too weak to reach up to 50 g.