2007CWC

張家維 (Chia-Wei Chang)

Fabrication and characterization of new-type Scratch Drive Actuator

新型抓爬式微致動器製程與特性之研究

This study demonstrates the fabrication and characterization of a low driving voltage scratch drive actuator (LVSDA), proposed by our laboratory in previous research. With flexible joints design on main plate of LVSDA near the bushing, the driving voltage can be reduced effectively. Due to smaller spring constant at the joints, this design can reduce driving voltage effectively and decrease the power consumption. In the fabrication process, LVSDA is made by the surface micromachining and nickel electroplating techniques.

The analysis begins at solid assembled modeling of the SDA structure, insulator and substrate by Solidworks®. Then the model is analyzed by Cosmosworks®. The results of simulation reveal that LVSDA has larger step size than traditional SDA. However, the experimental results reveal that LVSDA can be driven below 54 volts obviously less than 84 volts of traditional SDA. In the same plate length, output force of LVSDA can be generated at driving voltage from 50 to 80 volts； however, the force of traditional SDA is required over 80 volts. According to the different size of flexible joint, LVSDA may export the larger force between 60 to 90 volts. Therefore, the operating range of LVSDA is from 50 to 90 volts. Over 95 volts, output force of traditional SDA excesses the force of LVSDA.