The fabrication process and characterization of ARROW-B SPR sensor has been studied. First, the fabrication parameters of every layer according to our fabrication limit have been investigated. Second, a feasible design of ARROW-B SPR sensor has been proposed. A laboratory prototype of the miniaturized ARROW-B SPR sensor operating in aqueous environment has been fabricated by silicon-based processes. The guiding of ARROW-B has been demonstrated by observation, and the feasibility of application of SPR sensor based on the optical waveguide structure is also demonstrated. The relative output power versus superstrate index of ARROW-B SPR sensor has been party measured. In order to attain different superstrate index, a set of water-alcohol mixtures were used as the testing samples. The measured sensitivity of the developed ARROW-B SPR sensor was 763 dB/RIU within the region of refractive indices between 1.3407 and 1.3436.