This thesis focuses on the improvement on the yielding of previously proposed two-axis micro-accelerometer with symmetric coil-type suspension. The yielding is defined as the movable rate of the proof mass. To improve the yielding of the accelerometer, the suspension dimension is redesigned and the annealing parameters are modified. The differences between the experimental and simulated results are also investigated, including resonant frequency and coupling effect. In this micro-accelerometer, the differential capacitance sensing cantilevers and symmetrical suspension structure are utilized. The width of the suspension structure is increased from 1.6 μm to 1.86 μm, and the suspended gap is increased from 2μm to 3μm to have larger structural rigidity. With 950 °C annealing for 20sec both approaches as shown to increase the yielding more than 85%. For the resonant frequency, there was 20% difference between experimental and simulated results. After using the measured sizes of the suspension, and calibrated Young’s modulus, the current results of measured resonant frequency is shown to agree with the simulation results. For the coupling effect, the developed accelerometer utilized symmetrical design to avoid the coupling effect, but coupling between two axes still can be observed. It is found that the asymmetry of the suspension dimensions and input electrical signal frequency are two reasons. However, the reason of working frequency to affect coupling effect needs to be further investigated.