For near-field optical systems, Aperture and Solid Immersion Lens(SIL) that are popular techniques can overcome light diffraction limit and reduce spot size. According to previous researches, nano-aperture combined with SIL can improve the throughput owing to greater power densities at the aperture and reduce spot size to nano grade. However, the misalignment between the SIL and nano-aperture always occurred in assembling or bonding step. Earlier academic advanced a self–alignment technique to overcome the misalignment. But the method lack practical application in optical systems. In this thesis, the supporting structure can solve the problem.