In this dissertation, novel fabrication methods are proposed to fabricate the VCDs in different materials―polymer and metal. Both of them are low temperature and low cost techniques, and provide a flexible and affordable solution with the basic equipment of LIGA-like process. First, the operation model of VCD is performed with theoretical analysis and FEM simulation for dimensional design. For the fabrication of polymer-based VCD, the double-side multiple partial exposure (DoMPE) method is developed to extend the multi-level morphology on both the front and back sides of the suspended photoresist microstructures. Depending on the established processing data, different 3D photoresist microstructures made of photoresist AZ9260® are successfully demonstrated, as well as the polymer-based VCD. By comparing the analytical and experimental results, the feasibility on fabricating polymer-based VCD is verified.