Sputter Targets

Alessandro, Jon, Ciaran

All 3" diameter and 0.25" thickness

List of targets in storage and

Advice from Adriana Lita NIST Boulder 12/2013

So as target materials we have used a number of supliers, for different materials.

For example for Nb (as well as other materials) people have used Materion (former Williams Materials). Kurt Lesker is another supplier (we have used MgO, SiO2, Si..) for but generally tends to be more expansive than others. Recently for Si, since we needed high purity and could not find a supplier to guarantee a certain doping we had Virginia semiconductor cut our own targets from pure Si ingots. For W we have always used International Advanced Materials ( which does not have the most responsive staff…).

ACI Alloys is another company used by people in the cleanroom.

Hope this helps, let me know if you have more questions.

Best regards and happy holidays for the family!

Adriana.

Advice from Patrick Smutek 24/04/2014

Recommended Nb target supplier

Cerac Inc USA i.e. Materion

http://materion.com/Businesses/AdvancedMaterialsGroup

Links

Sputter system for superconducting films