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The reservation system with Google calendar started on 2021.04.27.

• 2023/10/18 The filament of the ionization gauge was broken (unknown reason) and changed to new one. Ziqiu, Fujiwara.

• 2022/06/22 (comment) When you use expensive metal (e.g. Au), use the same W boat more than once because W boats are expensive as well. Plus, some novel metals are not oxidized in air. Otsuka

• 2022/06/22 The N2 leak valve got worse again. To get a nice vacuum, remove air at the leak valve by pulling and tapping the screw part. Otsuka

• 2020/12/22 The N2 leak valve properly works. Please keep in mind that the same problem could happen quite soon. Then please let Otsuka know. Otsuka

• 2020/12/17 Cooling water (and pipes for it) are cleansed. Deposition rate (displayed values) should be more stable. Otsuka

• 2020/10/22 The rotary pump is replaced with a new one. Let us know if something is wrong. otsuka, matsushita, ito

• 2019/09/09 The N2 leak valve was broken and cannot be opened and closed normally. The threads of the screw have worn out due to aged deterioration. You are still able to use the vacuum deposition machine if you pay attention as follows. When you vent the chamber, you need to pull the knob of the valve to introduce N2, instead of rotating the knob. N2 can be stopped by releasing the knob. (Perhaps you need to push the knob and center rod of the valve to fully close it.) Please be careful not to touch the knob of the valve when you are pumping the chamber. Small movement of the knob might cause unintentional introduction of N2. Introduction of N2 during pumping does not damage the pumps and pressure gauges (air is harmful to them) but takes up your time for additional pumping. Please open the main valve of N2 cylinder only when you introduce N2. Please close it soon after you finish introducing N2. Please ask me if you have any concerns. Please let me know if you have any ideas for fixing it. Inoue

• 2018/12/06 The filament of the ionization gauge was broken (unknown reason) and changed to new one. Inoue

• 20171019 Rotary pump oil change. Otsuka, Yamamoto

• 20171017 The filament of the ionization gauge was broken and changed to new one. Inoue

• 20170420 Diffusion pump oil change. Otsuka