Notice

The exchange of vacuum pomp (shared with CVD2nd) on 2022/6/15.

Please join the Slack channel "ex_cvd-3rd" in order to share information about CVD 3rd.

The reservation system with Google calendar started on 2021.05.18.

Manual for gas-flow oriented CNTs (English)

日本語マニュアル

log sheet

Notice and custom log

• The exchange of vacuum pomp (shared with CVD2nd)  on 2022/6/15.

• 20190626 MFC of Ar/C2H2 was changed from 40-2000 to 10-500sccm one. Sato, Inoue

• 20190626 MFC of direct Ar/H2 was changed to 1-50sccm one. Now both MFCs for direct and bubbling have the range of 1-50sccm. Inoue

• 20190129 Ar/H2 MFCs (for carrier, bubbling) have been replaced with new ones. 2-100sccm for carrier and 1-50sccm for bubbling. Arai

• 20180803 CO2 and CH4/Ar was connected. Inoue

• 20170728 C2H2 and pure H2 was connected. Inoue

• 20160506 CVD3 has been newly assembled. Available. Inoue

• Atmospheric pressure CVD

Specification

• Place: 1st floor

• Type: Atmospheric pressure CVD (Normal pressure CVD)

• Furnace length: 300mm

• Connected gas: Ar, Ar/H2(3%), EtOH bubbled with Ar or Ar/H2, Ar/C2H2(2%) (Shearing MFC with CVD2), Pure H2 (Shearing MFC with CVD2)

• Please do not use CH4 gas without permission.