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Notice
Notice
Please join the Slack channel "ex_cvd-ht" in order to share information about high temperature CVD.
The reservation system with Google calendar started on 2021.05.18.
Notice
Notice
2024
6/5 Trap of scroll pump (CVD2) is replaced with a new one. Miyata
2023
1/16 Replacement of the heating elements (株式会社ヒートテック，Φ30用，SI-A6-4sKU). Kusakabe
2022
12/15 Thermocouple malposition cause low heating speed even at low temperature. The screw to fix thermocouple is now tighten and this problem is solved. Kusakabe
6/17 Scroll pump (CVD1) was temporally replaced with the previous "CVD2" scroll pump. The pressure after pump on is ~45Pa. Wang, Zheng, Otsuka
6/8 The left side of the flange and O-ring are exchanged. Robellows tube is exchanged to a longer one, too. Leak of HT-CVD2 decreased to 4 Pa/min. Nishimura
2021
9/24 Scroll pump (CVD2) is replaced with a backup pump (overhauled). Matsushita, Otsuka
2019
12/18 Gas line modification. O2 was reconnected directly to CVD1. MFC of Ar/H2 of CVD2 was replaced with 40-2000sccm one. Ar/C2H2 was connected to CVD2. Leak check OK. Fujisaki, Inoue
10/7 Power limiter of graphene-CVD2 furnace was set for safety. Maximum power ~ 75%. Arai
10/7 Temperature limiter of graphene-CVD2 furnace was set for safety. Allowed temperature is below 1350℃. If temperature were above that, output power would be automatically set to 0%, and alarm would turn on. Arai
7/28 PID parameter for higher temperature furnace (CVD2) has been set. CVD2 can be used now. If you want to use CVD2, please tell me. Arai
7/18 CVD2 was equipped with higher temperature furnace. PID parameter of thermocontroller has not been set. You cannot use now. Arai
7/9 The problem with CVD2 was solved. The leak is ~ 2Pa/5min now. Arai
7/4 Leak of CVD2 is too large(~15 Pa/5 min) now. Arai
How to use Monitoring System
How to use Monitoring System
Rules
Rules
Rules on electric furnaces
Basically, you have to stay close to the CVD furnaces during the experiment because they could cause a fire.
HT-CVD1 and HT-CVD2 cannot be used at the same time.
Our HT CVD setups (aka CVD for graphene) are equipped with web cameras, and you can check the condition of furnaces and monitors of thermometer or pressure gauge via internet. As far as the web cameras are working, it is allowed for you to tentatively move away from furnaces. But you have to keep checking the web camera images inside Eng. Building 2. You must not go away from our building during CVD (when the furnace is on).
Overnight running is basically not allowed but sometimes required for reasonable reasons (large single crystals, super slow reaction, etc.). In such cases, you must ask Lab staffs first, get special permission, and inform the details (who, when, what experiments) on #general (Slack). Also check the automatic shutdown system of CVD furnaces works well, and put up a notice (do not let it burn!) so that other people can know the situation and contact you if anything happens.
Rules on HT-CVD2
Bigger furnace of HT-CVD2 is for higher temperature (> 1100℃) experiment. It heats with more power compared with normal ones. It is potentially more dangerous. If you want to experiment with high temperature (> 1100℃), the permission will be required.
You have to use opaque mullite tubes instead of quartz tubes.
You have to turn off the breaker after use.
You cannot use 'advance' mode. (It still reaches 1200℃ in 20 minutes.)
Specifications
Place: 1st floor
Type: Low pressure, high temperature CVD
Furnace length: 260mm (HT-CVD1), 400mm (HT-CVD2)
Operating temperature: ~1100℃ (HT-CVD1), ~1400℃ (HT-CVD2)
Connected gas lines: ethanol, Ar, Ar/H2(3%), Ar/C2H2(2%), O2
取扱説明書（株式会社ヒートテック） 5．ヒーター交換方法
AHRF取扱説明書_Graphene-CVD2高温用.pdfOld notice about graphene CVD
Old notice about graphene CVD
2019
7/3 Chiller for borazine was stopped. Borazine tank was stored in the refrigerator in the basement. Arai
6/18 Thermocouple for CVD1 was replaced with a new one. The problem with thermocontroller was solved. Arai
6/5 Pump for CVD1 was replaced with another one. Zheng, Arai
5/16 BN-CVD can be done with CVD2 now. Please be sure to change the quartz tube depending on your experiments. Arai
4/25 We have done settings for monitoring system. You can use monitoring system now. Inoue, Arai
4/15 Borazine line of CVD1 was reformed. Arai
4/1 The server for monitoring system is out of service now. We cannot use monitoring system. Arai
3/31 Bypass line was connected to borazine supply system. Arai
3/25 Borazine line and chiller was connected to CVD1. You need the approval to use this line. Inoue, Arai
2018
10/19 Hydrogen generator was connected. Don't use it without permission. Inoue, ueda --> 11/21 Disconnected.
06/26 The monitoring system got back to normal state. Arai
06/20 The monitoring system is not working properly. FTP rush software is not connected to the server. Arai
05/24 Pressure gauge of CVD1 was replaced with a new one. The lowest pressure is ~21Pa now. Inoue, Arai
04/27 Pressure gauge of CVD1 is not working properly. Increase in lowest pressure of CVD1 may be due to this. Inoue, Arai
04/20 Foreline trap of CVD1 was replaced with new one. Arai
04/04 Scroll pump of CVD1 was replaced with new one. Inoue, Arai
02/09 The thermocouple of CVD-2 was replaced by a new one._Ueda
2017
11/20 The thermocouple of CVD-1 was replaced by a new one._Ueda
06/12 The furnace of CVD-1 was replaced by a new one._Kashiwa
05/25 Temperature of CVD-1 furnace sometimes continues to increase uncontrollably. Please pay attention when you use furnaces. --> 6/16 Now working well. _Kashiwa, Inoue
05/16 BN precursor tank and N2 gas cylinder was connected to CVD-1. (N2 was later changed to Ar). _Inoue
01/09 exchange thermal couple of CVD-2
01/04 Change quartz tube of CVD-1 _Sota
2016
09/30 Electrical short circuit occurred around CVD2 thyristor regulator because insulation tapes for wires were partially peeled off. Temperature controller was broken probably due to the short circuit. The controller was replaced. _Clement, Sota, Kashiwa
09/15 CVD-1 Ar/H2 tank exchange _Sota, Kashiwa
09/14 CVD-1 leak check
09/12 CVD-1 cleaning _sota,Kashiwa
06/02 New thermocouple works well _Sota, Kashiwa
06/07 CVD-1 leak check 15 Pa/14 hour _Sota
06/17 h-BN tank removal _Sota, Atwa, Clement
06/20 CVD maintenance _Sota
06/24 CVD-2 leak check 1 Pa/3 days _Sota
06/27 Safety system setting _Sota
06/28 Unification of monitoring software _Sota, Yoshikawa
05/20 CVD-2 leak check 40 Pa/13 hour _Sota
05/31 CVD-1 leak maintenance _Sota, kashiwa, Ueda
05/31 CVD-2 thermocouple change(new one shows 1060℃ when others show 1065℃) _Sota, kashiwa
2015
12/19 Pump of CVD-2 (noisy, 25Pa) was changed. Tsushima, Inoue
05/15 Tank for h-BN was assembled to CVD-2. Tsushima, Inoue
03/24 CVD-2 was constructed. Tsushima, Sota, Inoue
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