The exchange of vacuum pomp (shared with CVD3rd) on 2022/6/15.
Please join the Slack channel "ex_cvd-2nd" in order to share information about CVD (2nd).
The reservation system with Google calendar started on 2021.05.18.
2024.05.29 MFC for ethanol may be broken, and is temporarily replaced with the one for Ar (FS 50 sccm). Unused lines were removed (H2, CH4, H2O). Almost all the ribbon heaters are removed due to MFC failure. You cannot heat the ethanol tank to increase the flow rate. Also, the system for isotope labeling will be installed sometime soon.... Otsuka, Fujiwara
2023/05/25 The log sheet was modified by Shimada.
20220615 The exchange of vacuum pomp (shared with CVD3rd)
20191204 Monitoring camera was detached. Arai
20191203 Leak of CVD 2nd is too large (~ 15Pa/5min). Arai
20191029 The MFC for Ar&ArH2 was changed with 40-2000sccm range one. Fujisaki, Inoue
20190813 Monitroing system was installed into CVD 2nd and the PC next to CVD 2nd. You can check the controller for CVD 2nd via Toppage of our labwiki. Arai
20181014 Accidnet (Timer was dropped on the hot furnace and burnt). Unavailable. --> 11/13 The furnace was repaired. Available. Igimi, Inoue
20180803 CO2 and CH4/Ar was connected. Inoue
20170816 Second line of ethanol was taken out of the CVD system. Leak checked (0.3 Pa in 5 min). otsuka
20170728 Gas line was modified. Pure H2 and C2H2 lines share MFCs with CVD3 now. Inoue
20170712 Hydrogen gas generator has been assembled. You must not use it without permission. Inoue, Yamamoto
Place: 1st floor
Type: Low pressure CVD
Furnace length: 560mm (Two-zone)
Connected gas lines:
ethanol: MFC(SEC-8440LS, 10-500sccm) MFC(SEC-E40MK3, -50sccm, Ar calibrated)
Ar, Ar/H2(3%): MFC(SEC-E40MK3, 10-500sccm)
H2O: MFC(SEC-8440F, 10-500sccm, Calibrated to MtOH)
Ar/C2H2(2%), Ar/CH4(1%), CO2: MFC(SEC-E40MK3, 40-2000sccm, Shared with CVD3)
pure H2 (H2 generator): MFC(SEC-E40, 10-500sccm, Shared with CVD3)
!!Usage of pure H2 requires special permission. Ask lab staffs.!!