Metal Etch
Available Etching Processes:
Commercial Etching Processes:
The information listed below is for suggestion only, users need get proof from IEN Staff before using them on IEN equipment.
Mo CF4, CF4 + O2
W CF4, CF4 + O2
Au C2Cl2F4
Pt CF4 + O2, C2Cl2F4 + O2, C2Cl3F3 + O2
Ti CF4
Ta CF4
Cr Cl2, CCl4, CCl4 + Air
Cr2O3 Cl2 + Ar, CCl4 + Ar
Al CCl4, CCl4 + Ar, BCl3
Al2O3 CCl4, CCl4 + Ar, BCl3
GaAs CCl2F2