Metal Etch

Available Etching Processes:

Aluminum (Al)

Copper (Cu)

Titanium (Ti)

Chromium (Cr)

Commercial Etching Processes:

The information listed below is for suggestion only, users need get proof from IEN Staff before using them on IEN equipment.

Mo CF4, CF4 + O2

W CF4, CF4 + O2

Au C2Cl2F4

Pt CF4 + O2, C2Cl2F4 + O2, C2Cl3F3 + O2

Ti CF4

Ta CF4

Cr Cl2, CCl4, CCl4 + Air

Cr2O3 Cl2 + Ar, CCl4 + Ar

Al CCl4, CCl4 + Ar, BCl3

Al2O3 CCl4, CCl4 + Ar, BCl3

GaAs CCl2F2