STS PECVD 3
Introduction
Introduction
STS PECVD 3 will be dedicated for doped Silicon Dioxide deposition, PH3 will be available for p-type oxide doping.
The equipment will be available soon!
STS PECVD 3 will be dedicated for doped Silicon Dioxide deposition, PH3 will be available for p-type oxide doping.
The equipment will be available soon!
