Embedded Files
Microposit S1813 is a positive photoresist. It is optimized for g-line exposure, while effective for broad-band exposure. Check this link for official data sheet. Since the mask aligners in IEN cleanroom are all configured at either 365 nm (i-line), or 405 nm (h-line), optimum exposure value will be different official data sheet. Below is the reference recipe.
Microposit S1813 is a positive photoresist. It is optimized for g-line exposure, while effective for broad-band exposure. Check this link for official data sheet. Since the mask aligners in IEN cleanroom are all configured at either 365 nm (i-line), or 405 nm (h-line), optimum exposure value will be different official data sheet. Below is the reference recipe.
Page updated
Google Sites
Report abuse