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Microposit SPR220-7.0 is a positive photoresist. It is optimized for i-line (365nm) exposure, while effective for broad-band exposure. Check this link for official data sheet. i-line UV source is available on all the mask aligners in IEN Cleanroom facilities. Below is the reference recipe.
Microposit SPR220-7.0 is a positive photoresist. It is optimized for i-line (365nm) exposure, while effective for broad-band exposure. Check this link for official data sheet. i-line UV source is available on all the mask aligners in IEN Cleanroom facilities. Below is the reference recipe.
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