Standard Operation Procedure for Yes R-1 Plasma Cleaner
Purpose: to remove residual organics and thin oxides from the surface of a sample
Location: Pettit Cleanroom
Setup Procedures:
1. Make sure the electrode shelves are in place and secure.
2. Select the desired plasma recipe.
Number of substrates: 1 up to however many will fit on the substrate shelf
Process Procedures:
1. Place your sample in the process chamber.
2. Start the recipe.
3. Take note of the process parameters during the process step (6 min).
4. Select and run the vent process (1-2 min).
5. Remove your sample from the chamber.
6. Make sure the door is closed.
Time: approximately 15 minutes