Quartz Etch
Quartz is made up of a continuous framework of SiO4 silicon–oxygen tetrahedra, with each oxygen being shared between two tetrahedra, giving an overall formula SiO2. Fused quartz or fused silica is glass consisting of high-purity silica in amorphous (non-crystalline) form. It is different from traditional glasses in that no other ingredients are added to lower the melt temperature. Fused silica, therefore, has much higher working and melting temperatures than soda-lime or borosilicate glasses.
Quartz is made up of a continuous framework of SiO4 silicon–oxygen tetrahedra, with each oxygen being shared between two tetrahedra, giving an overall formula SiO2. Fused quartz or fused silica is glass consisting of high-purity silica in amorphous (non-crystalline) form. It is different from traditional glasses in that no other ingredients are added to lower the melt temperature. Fused silica, therefore, has much higher working and melting temperatures than soda-lime or borosilicate glasses.
Quartz and Fused Silica can be etched in other ICP equipment. While STS AOE is dedicated to Quartz etching due to its special design.
Etching Recipe
